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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Roy, A. Dhar, A. Ray, S.K. |
| Copyright Year | 2007 |
| Description | Author affiliation: Indian Inst. of Technol. Kharagpur, Kharagpur (Roy, A.; Dhar, A.; Ray, S.K.) |
| Abstract | We have investigated the structural and electrical properties of metal-ferroelectric-insulator-semiconductor capacitors with 280-nm-thick $SrBi_{2}Ta_{2}O_{9}$ (SBT) ferroelectric films grown on Si as well as on Si with buffer layer $(HfO_{2}).$ The SBT thin films and $HfO_{2}$ buffer layer were fabricated using rf magnetron sputtering method. XRD patterns revealed the formation of well crystallized SBT perovskite thin film on the $HfO_{2}$ buffer layer which is evident from sharp peaks in XRD spectra. The electrical properties of the metal-ferroelectric-insulator- semiconductor (MFIS) structure were characterized by varying thickness of the $HfO_{2}$ layer. The width of memory window in the capacitance-voltage curves for the MFIS structure decreased with increasing thickness of $HfO_{2}$ layer. Leakage current density decreased significantly after inserting $HfO_{2}$ buffer layer. This shows that the proposed $Al/SrBi_{2}Ta_{2}O_{9}/HfO_{2}/Si$ structure ideally suitable for high performance ferroelectric memories. |
| Starting Page | 103 |
| Ending Page | 106 |
| File Size | 262375 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424417278 |
| DOI | 10.1109/IWPSD.2007.4472463 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-12-16 |
| Publisher Place | India |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Buffer layers Ferroelectric films Semiconductor thin films SBT thin film Capacitance-voltage characteristics Capacitors Crystallization hafnium oxide Hafnium oxide Sputtering Magnetic semiconductors Ferroelectric X-ray scattering memory window |
| Content Type | Text |
| Resource Type | Article |
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