NDLI: Simultaneous topographic and thermal imaging of silicon nanowires using a new SThM probe

Content Provider	IEEE Xplore Digital Library
Author	Puyoo, E. Grauby, S. Rampnoux, J. Claeys, W. Rouviere, E. Dilhaire, S.
Copyright Year	2010
Description	Author affiliation: CPMOH, Université Bordeaux 1, 351, cours de la Libération, 33405 Talence cedex, France (Puyoo, E.; Grauby, S.; Rampnoux, J.; Claeys, W.; Dilhaire, S.) \|\| CEA - DRT/LITEN/DTNM, LCH, 17 Rue des Martyrs, 38 054 Grenoble cedex (Rouviere, E.)
Abstract	In Scanning Thermal Microscopy (SThM) techniques, the probe, and more particularly the tip, plays a major role in the spatial resolution limitation and in the acquisition speed. We present a new commercial resistive SThM probe constituted of a Palladium (Pd) film on a SiO2 substrate. We first describe its geometry and electrical properties. Then, we present topographic and thermal images of silicon nanowires, which show the very good spatial resolution (<100nm) and the high acquisition speed obtained with this probe. To extract thermal parameters from a thermal image, a calibration of the probe is necessary. Hence, we propose a model for the probe and we finally use it to identify its geometric, electrical and thermal parameters.
Starting Page	1
Ending Page	6
File Size	1074727
Page Count	6
File Format	PDF
ISBN	9781424484539
e-ISBN	9782355000126
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-10-06
Publisher Place	Spain
Access Restriction	Subscribed
Rights Holder	EDA Publishing
Subject Keyword	Temperature measurement Resistance Heating Thermal conductivity Nanowires Probes Spatial resolution
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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