NDLI: Capacitive micromachined ultrasonic transducers with integrated optoelectronic readout

Content Provider	IEEE Xplore Digital Library
Author	Degertekin, F.L. Hall, N.A. Wook Lee
Copyright Year	2001
Description	Author affiliation: G.W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA (Degertekin, F.L.)
Abstract	Capacitive detection methods impose several limitations on the performance of capacitive micromachined ultrasound transducers (cMUT) such as low sensitivity below MHz frequencies and low limits on acoustic power output. Optical interferometric detection of cMUT membrane displacement solves these problems by providing a flat frequency response down to DC and electrical isolation between transmitting and receiving electronics. A phase-sensitive optical diffraction grating structure formed by placing a grated electrode under the cMUT membranes enables integration of optoelectronic readout circuitry to cMUT arrays while allowing efficient transmit operation using capacitive actuation. This structure is used to measure membrane displacements down to 10/sup -4/ /spl Aring///spl radic/Hz level in the DC-2MHz range on cMUTs fabricated on quartz substrates. The possibility of enhanced displacement sensitivity for immersion applications by forming a multi-pass interferometer is discussed and an optical analysis of the detection method is described. The feasibility of hybrid optoelectronics integration for phased array operation is also demonstrated by experiments on cMUTs using vertical cavity surface emitting lasers and 1/spl times/8 array of photodetectors with integrated CMOS amplifiers.
Sponsorship	Ultrasonics, Ferroelectr., & Frequency Control Soc
Starting Page	875
Ending Page	881
File Size	650768
Page Count	7
File Format	PDF
ISBN	0780371771
DOI	10.1109/ULTSYM.2001.991860
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2001-10-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Ultrasonic transducers Phased arrays Optical interferometry Optical arrays Biomembranes Acoustic signal detection Optical sensors Vertical cavity surface emitting lasers Ultrasonic imaging Acoustic transducers
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in