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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Ansimkin, I.V. Anisimkin, V.I. Hickernell, F.S. |
| Copyright Year | 2001 |
| Description | Author affiliation: Inst. of Radio Eng. & Electron., Acad. of Sci., Moscow, Russia (Ansimkin, I.V.) |
| Abstract | By considering the 6 most popular planes of quartz and LiNbO/sub 3/, a multi-channel SAW analytical tool for sensing is optimized. The best anisotropy conditions for the SAW velocity, elastic displacement, electric coupling, and temperature sensitivity are found to be on the ST-plane of the former and 128/spl deg/Y-rotated plane of the latter with orientation of the channels at 0/spl deg/, -33/spl deg/, +47/spl deg/ and /spl theta/ = 0/spl deg/, 46/spl deg/, 80/spl deg/, 115/spl deg/ off x-axis respectively. Based on the optimized orientations, two novel prototypes were fabricated using photomasks integrating all the channels on a single plate. The anisotropy of different channels of the tools was tested for uncoated and PVA coated substrates, both for humid air, as the example. The difference in SAW responses and in the calibration curves of the channels was found to be sufficient to make an appropriate analysis of gas-phase adsorption. The largest number of channels on a substrate was found to be 5. |
| Sponsorship | Ultrasonics, Ferroelectr., & Frequency Control Soc |
| Starting Page | 331 |
| Ending Page | 335 |
| File Size | 326951 |
| Page Count | 5 |
| File Format | |
| ISBN | 0780371771 |
| DOI | 10.1109/ULTSYM.2001.991636 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2001-10-07 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Surface acoustic waves Anisotropic magnetoresistance Conductive films Couplings Temperature sensors Substrates Sensor arrays Conductivity Piezoelectric films Transducers |
| Content Type | Text |
| Resource Type | Article |
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