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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Mingxi Deng |
| Copyright Year | 2001 |
| Description | Author affiliation: Dept. of Phys., Chongqing Univ., China (Mingxi Deng) |
| Abstract | Interdigital transducers (IDTs) in a substrate will generate bulk acoustic waves (BAWs) along with the surface acoustic waves. Whereas the effect of BAW generation by IDTs may be employed to fabricate BAW transducers working at high frequency, the relationships of BAW generation by IDTs are discussed in this article. The resistance densities of BAW generation by IDTs are employed to describe the efficiency of BAW generation for given crystal orientations. The results of simulation show that for some crystal orientations there are the most efficient BAW generations. The generation directions of pure BAW modes are illustrated. Moreover, the possibility of fabricating HF BAW transducers by IDTs is discussed. |
| Sponsorship | Ultrasonics, Ferroelectr., & Frequency Control Soc |
| Starting Page | 855 |
| Ending Page | 858 |
| File Size | 319004 |
| Page Count | 4 |
| File Format | |
| ISBN | 0780371771 |
| DOI | 10.1109/ULTSYM.2001.991854 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2001-10-07 |
| Publisher Place | USA |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Acoustic waves Acoustic transducers Hafnium Surface acoustic waves Ultrasonic transducers Piezoelectric transducers Frequency Sawing machines Permittivity Physics |
| Content Type | Text |
| Resource Type | Article |
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