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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Falconer, R.S. Lec, R. Vetelino, J.F. Xu, Z. |
| Copyright Year | 1989 |
| Description | Author affiliation: Dept. of Electr. Eng., Maine Univ., Orono, ME, USA (Falconer, R.S.; Lec, R.; Vetelino, J.F.; Xu, Z.) |
| Abstract | A simple theoretical model is applied to the problem of a SAW (surface acoustic wave) gas sensor which operates on the principle of conductivity changes within the sensing film. The model allows the prediction of SAW sensor response for a film of known conductivity variations, and the theoretical value of SAW velocity change agrees very well with that determined by experiment. The electroacoustic attenuation was also determined to be a significant factor in designing a SAW sensor. SAW sensor response can be optimized by designing the device such that the sheet conductivity of the film is within some region dependent upon the substrate material. A WO/sub 3/ film could be designed to have a sheet conductivity within a specific range by tailoring parameters such as film thickness, doping, and heat treatment. A sensor consisting of an ST-cut SiO/sub 2/ substrate and a WO/sub 3/ film selectively sorbent to H/sub 2/S was investigated. The SAW gas sensor is configured so that the film sheet conductivity and sensor response are measured simultaneously upon exposure to H/sub 2/S. Specific operating conditions are obtained that optimized the SAW gas sensor response. |
| Starting Page | 585 |
| Ending Page | 590 |
| File Size | 457565 |
| Page Count | 6 |
| File Format | |
| DOI | 10.1109/ULTSYM.1989.67051 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1989-10-03 |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Surface acoustic waves Gas detectors Conductive films Conductivity Semiconductor films Substrates Acoustic waves Predictive models Acoustic sensors Attenuation |
| Content Type | Text |
| Resource Type | Article |
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