NDLI: Optimising dynamic behaviour of electrostatically actuated MEMS contact switch

Content Provider	IEEE Xplore Digital Library
Author	Lishchynska, M. Cychowski, M. Canty, N. O'Mahony, T. Delaney, K.
Copyright Year	2009
Description	Author affiliation: Advanced Control Group, Cork Institute of Technology, Rossa Avenue, Bishopstown, Ireland (Canty, N.; O'Mahony, T.) \|\| TEC Centre, Cork Institute of Technology, Rossa Avenue, Bishopstown, Ireland (Lishchynska, M.; Cychowski, M.; Delaney, K.)
Abstract	The reliability of the electrostatically actuated MEMS contact switches is known to be significantly undermined by the unstable dynamic behaviour of devices. High impact forces, bouncing at the contact and oscillations upon release result in substantial mechanical damage to the contacts and the switch compromising the functionality of the switch and reducing its lifetime. Certain effects become more pronounced, such as stiction causing ‘fail-to-open’ malfunctions, resistance increases leading to degraded performance, as well as fracture. To address the issue of the dynamic instability of the switch behaviour this work employs Finite Element Analysis (FEA), linear and nonlinear system identification techniques and optimal control theory to study the dynamic performance of the switch and optimise (soften) its dynamic behaviour by establishing an actuation input voltage that substantially reduces or eliminates the instabilities.
Starting Page	1
Ending Page	7
File Size	694273
Page Count	7
File Format	PDF
ISBN	9781424441600
DOI	10.1109/ESIME.2009.4938463
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-04-26
Publisher Place	The Netherlands
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Contacts Switches Nonlinear dynamical systems Electrodes Optimal control Microswitches Voltage Geometry System identification
Content Type	Text
Resource Type	Article

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