NDLI: Simulating the real geometry of an electrostatic switch to study the effect of uncertainties on the pull-in voltage.

Content Provider	IEEE Xplore Digital Library
Author	Achkar, H. Pons, P. Sartor, M. Plana, R.
Copyright Year	2009
Description	Author affiliation: CNRS; LAAS; 7 avenue du colonel Roche, F-31077 Toulouse, France (Achkar, H.; Pons, P.; Plana, R.) \|\| Universite de Toulouse ; UPS, INSA, LGMT, 135 avenue de Rangueil 31077, France (Sartor, M.)
Abstract	Modelling of MEMS is one of the difficulties faced in advancing the design. The parameters fed to the simulator consist of the material properties and the geometry of the structure. Material wise, researchers are working on developing precise characterisation techniques to ameliorate the mechanical definition of structural material used. More work is now ongoing to ameliorate the fabrication process in order to get precisely what we designed. Concerning the electrostatic actuated RF MEMS switches, we always found a big offset in the pull-in voltage between what we design and what we measure. For that reason, we launched a study on the parameters affecting the actuation voltage in order to understand which is the most penalizing in order to ameliorate the process in this direction. The reverse engineering method will permit us to understand and specify the parameters affecting most the offset between simulated and fabricated switches. A study was done in this direction in order to define the critical parameters and predict the shift in the results.
Starting Page	1
Ending Page	4
File Size	12152161
Page Count	4
File Format	PDF
ISBN	9781424441600
DOI	10.1109/ESIME.2009.4938451
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-04-26
Publisher Place	The Netherlands
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Switches Solid modeling Geometry Electrostatics Uncertainty Voltage Micromechanical devices Material properties Fabrication Radiofrequency microelectromechanical systems
Content Type	Text
Resource Type	Article

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