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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Jurying Zhou Chunmin Tao Chenbo Yin |
| Copyright Year | 2008 |
| Description | Author affiliation: Mech. & Electron. design & Res. Inst., Jiangxi Blue Sky Univ., Beijing (Jurying Zhou) |
| Abstract | A three-dimensional finite element model of a surface acoustic wave (SAW) delay line based hydrogen gas sensor on Y- X cut $LiNbO_{3}$ substrate with a palladium film was developed and simulated using ANSYS platform. The changes of the output voltage were studied due to the exposure of the palladium film to hydrogen, and the effects of the elastic modulus and density changes of the Pd film were analyzed. The effects of the palladium film density decrease and elastic modulus decrease on the SAW hydrogen gas sensor are in opposite ways. The effect resulted from the elastic modulus decrease is more obvious. The impulse response analysis of the device was performed, from which the frequency response and hence a center frequency of about 100 MHz was obtained. |
| Starting Page | 1168 |
| Ending Page | 1171 |
| File Size | 228164 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424419074 |
| DOI | 10.1109/NEMS.2008.4484525 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-01-06 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Surface acoustic waves Hydrogen Gas detectors Palladium Finite element methods Acoustic waves Delay lines Substrates Voltage Performance analysis finite element method(FEM) surface acoustic wave(SAW) piezoelectric hydrogen gas sensor |
| Content Type | Text |
| Resource Type | Article |
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