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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yiwu Ma Zaochun Zhang Lisheng Gao |
| Copyright Year | 2008 |
| Description | Author affiliation: State Key Lab. of Transducer Technol., Chinese Acad. of Sci., Hefei (Yiwu Ma; Zaochun Zhang; Lisheng Gao) |
| Abstract | On the basis of thick-film technology, a novel gap- variation-type thick-film capacitive micro-displacement sensor have been developed to detect nanometer-scaled displacement, using 96% $A1_{2}O_{3}$ ceramic plates and Pd-Ag conducting paste via a print-fire process. This paper describes the principle, structural design and theoretic computation of the capacitive sensor. Factors affecting the sensors' resolution and linearity, and effects of materials and technological parameters are also discussed. Tests results of the preliminary prototype sensors show that the as-prepared prototype sensors possess good linearity (about 2%, without additional compensation or corrections) and resolution (about 0.025/100 nm). The obtained results demonstrate that the sensors have favorable applied prospects. |
| Starting Page | 90 |
| Ending Page | 94 |
| File Size | 179917 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424419074 |
| DOI | 10.1109/NEMS.2008.4484293 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2008-01-06 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Capacitive sensors Thick film sensors Ceramics Optical feedback Thick films Probes Intelligent sensors Aluminum oxide Optical distortion Optical films ceranics micro-displacement measurement thick film capacitive sensor nanotechnology |
| Content Type | Text |
| Resource Type | Article |
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