NDLI: On the Optimality of One-Unit Cycle Scheduling of Multi-Cluster Tools with Single-Blade Robots

Content Provider	IEEE Xplore Digital Library
Author	Wai Kin Chan Jingang Yi Shengwei Ding
Copyright Year	2007
Description	Author affiliation: Rensselaer Polytech. Inst., Troy (Wai Kin Chan)
Abstract	In semiconductor manufacturing, finding an efficient way for scheduling a multi-cluster tool is crucial for productivity improvement and cost reduction. In this paper, we analyze optimal scheduling of multi-cluster tools under a general configuration with non-zero constant transfer robot traveling time. A resource-based method is developed to analyze optimal scheduling of single-cluster tools. Optimality conditions for obtaining minimum one-unit cycle time for multi-cluster tools are established. Under these conditions, it is shown that the optimal one-unit cycle can be achieved by first optimally scheduling each single-cluster tool separately and then combining the schedules to form the optimal schedule for the multi-cluster tool. A polynomial-time algorithm is presented to find the optimal one-unit cycle time and its corresponding schedules for a multi-cluster tool.
Starting Page	392
Ending Page	397
File Size	531879
Page Count	6
File Format	PDF
ISBN	9781424411535
DOI	10.1109/COASE.2007.4341844
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-09-22
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Optimal scheduling Robot kinematics Job shop scheduling Service robots Semiconductor device manufacture Manufacturing automation Robotics and automation Productivity Polynomials Clustering algorithms
Content Type	Text
Resource Type	Article

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