NDLI: Multi-criteria Dynamic Scheduling Methodology for Controlling a Semiconductor Wafer Fabrication System

Content Provider	IEEE Xplore Digital Library
Author	Huai Zhang Zhibin Jiang Hongtao Hu
Copyright Year	2007
Description	Author affiliation: Shanghai Jiaotong Univ., Shanghai (Huai Zhang; Zhibin Jiang; Hongtao Hu)
Abstract	Scheduling semiconductor wafer fabrication system (SWFS) is a very difficult problem. The assignment of wafer lots to machines is a complex problem that is often solved in real-time with simple dispatching rules. This paper proposes a multi-criteria dynamic scheduling methodology based on fuzzy logic and design of experiment (DOE). We adopt a fuzzy multi-criteria decision strategy to simultaneously take into account multiple aspects in every dispatching decision. Since most global dispatching rules only consider the static bottleneck to keep line balance, we also incorporate in the multi-criteria algorithm a specific heuristic rule that takes into account the dynamic bottleneck. Moreover, we also adopt DOE and multiple response optimization method to tune the weights associated to each decision criteria in the decision algorithm. A mini-fab model developed by Intel in collaboration with ASU is utilized to illustrate the proposed approach.
Starting Page	213
Ending Page	218
File Size	842833
Page Count	6
File Format	PDF
ISBN	9781424411535
DOI	10.1109/COASE.2007.4341681
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-09-22
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Dynamic scheduling Control systems Fabrication Dispatching Job shop scheduling Semiconductor device manufacture Manufacturing processes Industrial engineering Engineering management Mechanical engineering
Content Type	Text
Resource Type	Article

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