NDLI: Modeling for Simulation and Control of a X-Y High Precision Positioning Table

Content Provider	IEEE Xplore Digital Library
Author	Zimmermann, J. Sawodny, O.
Copyright Year	2007
Description	Author affiliation: Stuttgart Univ., Stuttgart (Zimmermann, J.; Sawodny, O.)
Abstract	The production of micro-scale objects with nano-scale properties demands for appropriate measurement and test equipment for quality control. This work is motivated by an experimental setup to proof nano-positioning capabilities with 200 mm traveling range. This paper is about the modeling of an x-y high precision positioning table, with double-H-configuration and driven by direct linear DC motors, using the Lagrange method. Furthermore the elasto-plastic friction model was extended, based on system parameters and former experiments with nano-positioning guides. The influence of the normal force on the friction force is essential for creating a connection between the macroscopic and microscopic models. A simplified model for control purposes was derived and applied to a PI-state regulator with additional feedforward of the system dynamics. Simulation results show the effectiveness of the approach.
Starting Page	1093
Ending Page	1098
File Size	606741
Page Count	6
File Format	PDF
ISBN	9781424411535
DOI	10.1109/COASE.2007.4341750
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-09-22
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Nanopositioning Position measurement Friction DC motors Mirrors Lagrangian functions Gravity Production Collaborative work Automation
Content Type	Text
Resource Type	Article

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