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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Yanbing Leng Lianhe Dong Yanjun Sun |
| Copyright Year | 2009 |
| Description | Author affiliation: Changchun University of Science and Technology, 130022 China (Yanbing Leng; Lianhe Dong; Yanjun Sun) |
| Abstract | Although the diamond film is one of the most potential micromachining structures functional materials, it is rather difficult to molded because of its extremely high hardness and chemical stability. In this article, we applied a method for micro-gear structure producing based on Reactive Ion Etching (RIE) of diamond film and consequently produced diamond film gear which has a thickness of 5um and a modulus of 0.003. The result of our experiments applied that the diamond film pattern that has smooth surface, clear contours and vertical sidewall can be produced by using NiTi alloy film and the photoresist etching together as the mask for diamond film. Etching rate and the flatness of etching side can be affected by the process parameters of etching of O or O/ Ar mixed gas to diamond films patterning such as RF power, system pressure, flow and the proportion of mix gas. When there are pressure of 12 pa and flow of 50sccm steadily, RF power and etching rate varies linearly. While RF power is too high, higher than 135 w, diamond film turn black for the deposited on its surface generated by the mask. For a given instant process condition, the etching rate of the diamond film isn't strongly depends on the O concentration in the gas mixture. |
| Starting Page | 1656 |
| Ending Page | 1660 |
| File Size | 4394821 |
| Page Count | 5 |
| File Format | |
| ISBN | 9781424426928 |
| DOI | 10.1109/ICMA.2009.5246309 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2009-08-09 |
| Publisher Place | China |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Fabrication Gears Etching Radio frequency Micromachining Chemicals Stability Resists Argon Power generation RIE micro-system diamond film gears |
| Content Type | Text |
| Resource Type | Article |
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