NDLI: High-performance high-κ/metal gates for 45nm CMOS and beyond with gate-first processing

Content Provider	IEEE Xplore Digital Library
Author	Chudzik, M. Doris, B. Mo, R. Sleight, J. Cartier, E. Dewan, C. Park, D. Bu, H. Natzle, W. Yan, W. Ouyang, C. Henson, K. Boyd, D. Callegari, S. Carter, R. Casarotto, D. Gribelyuk, M. Hargrove, M. He, W. Kim, Y. Linder, B. Moumen, N. Paruchuri, V.K. Stathis, J. Steen, M. Vayshenker, A. Wang, X. Zafar, S. Ando, T. Iijima, R. Takayanagi, M. Narayanan, V. Wise, R. Zhang, Y. Divakaruni, R. Khare, M. Chen, T.C.
Copyright Year	2007
Description	Author affiliation: IBM Semicond. Res. & Dev. Center, Hopewell (Chudzik, M.)
Abstract	Gate-first integration of band-edge (BE) high-κ/metal gate nFET devices with dual stress liners and silicon-on-insulator substrates for the 45nm node and beyond is presented. We show the first reported demonstration of improved short channel control with high-κ/metal gates (HK/MG) enabled by the thinnest $T_{inv}$ (≪12Å) for BE nFET devices to-date, consistent with simulations showing the need for ≪14Å T at Lgate≪35nm. We report the highest BE HK/MG nFET Idsat values at 1.0V operation. We also show for the first time BE high-κ/metal gate pFET's fabricated with gate-first high thermal budget processing with thin $T_{inv}$ (≪13Å) and low Vts appropriate for pFET devices. The reliability in these devices was found to be consistent with technology requirements. Integration of high-κ/metal gate nFET's into CMOS devices yielded large SRAM arrays.
Starting Page	194
Ending Page	195
File Size	555531
Page Count	2
File Format	PDF
ISBN	9784900784031
DOI	10.1109/VLSIT.2007.4339689
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-12
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	JSAP
Subject Keyword	CMOS process CMOS technology Helium Research and development Electronic components Stress Silicon on insulator technology Substrates Random access memory CMOS logic circuits
Content Type	Text
Resource Type	Article

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