NDLI: Integration Of Surface Micromachined Polysilicon Mirrors And A Standard Cmos Process

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Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95

Volume 2 - 1995

Volume 1 - 1995

Chemical Sensing With Laser Spectroscopy

Biomimetic Sensing Systems With Arrayed Nonspecific Sensors

Polysilicon Integrated Microsystems: Technologies And Applications

Linking Sensors With Telemetry: Impact On The System Design

An Implantable Multichannel Digital Neural Recording System For A Micromachined Sieve Electrode

Self Tuning Inductive Powering For Implantable Telemetric Monitoring Systems

A Multichannel Neuromuscular Microstimulator With Bi-directional Telemetry

Microfabrication And Characterisation Of Microelectrode Arrays For In Vivo Nerve Signal Recording

An Active, Microfabricated, Scalp Electrode-array For EEG Recording

Fabrication Of SOI Wafers With Buried Cavities Using Silicon Fusion Bonding And Electrochemical Etchback

Automatic Etch Stop On Buried Oxide Using Epitaxial Lateral Overgrowth

A CMOS Dissolved Wafer Process For Integrated P++ Microelectromechanical Systems

pH-controlled TMAH Etchants For Silicon Micromachining

A New Etching Method For Single Crystal Al/sub 2/O/sub 3/ Film On Si Using Si Ion Implantation

Confined Selective Epitaxial Growth: Potential For Smart Silicon Sensor Fabrication

Selective Seeding Of Copper Films On Polyimide Patterned Silicon Substrate, Using Ion Implantation

Hexsil Bimorphs For Vertical Actuation

Parallel Processing Architecture For Sensory Information

A Low-power Wireless Microinstrumentation System For Environmental Monitoring

An Advanced Engine Knock Detection Module Performs Higher Accurate Mbt Control And Fuel Consumption Improvement

Local positioning system by means of enclosing signal field

Oversampled A/D Interface Circuit For Integrated AC-power Sensor

A Reflected Light-receiver With 2nA Sensitivity Using CDS And A Separate Lowpass-filtering Of The Input Signal At Each Clock-phase

Near-sensor Image Processing, A VLSI Realization

Integrated Electrostatic RMS-to-DC Converter Using IC-Compatible Surface Micromachining

Contactless Angle Measurement By Cmos Magnetic Sensor With On Chip Read-out Circuit

CMOS RC-Oscillator Technique For Digital Read Out From An IR Bolometer Array

Low-power Single-chip CMOS Potentiostat

An Oscillator Circuit For Electrostatically Driven Silicon-based One-port Resonators

On-chip Integration Of High-voltage Generator Circuits For An Electrostatic Micromotor

Diode-based Thermal Rms Converter With On-chip Circuitry Fabricated Using Standard CMOS Technology

High-voltage Devices And Circuits Fabricated Using Foundry Cmos For Use With Electrostatic Mem Actuators

Mixed Analog-digital Highly-sensitive Sensor Interface Circuit For Low-cost Microsensors

Fast 3d Laser Micromachining Of Silicon For Micromechanical And Microfluidic Applications

Micro Assembly By High Rate CVD Using CW UV Laser

A Reshaping Technology With Joule Heat For Three Dimensional Silicon Structures

Process-dependent Thermophysical Properties Of CMOS IC Thin Films

Mistic 1.1: A Process Compiler for Micromachined Devices

Alignment Of Mask Patterns To Crystal Orientation

Boron Etch-stop In TMAH Solutions

Gallium Doping For Silicon Etch Stop In Koh

In Situ Phosphorus-doped Polysilicon For Integrated Mems

Thick Polycristalline Silicon For Surface Micromechanical Applications: Deposition, Structuring And Mechanical Characterization

Polysilicon Surface Modification Technique To Reduce Sticking Of Microstructures

Ammonium Fluoride Anti-stiction Treatments For Polysilicon Microstructures

Post-processing Release Of Microstructures By Electromagnetic Pulses

Differential Adhesion Method For Microstructure Release: An Alternative To The Sacrificial Layer

A novel method to avoid sticking of surface micromachined structures

Permeable Polysilicon Etch-access Windows For Microshell Fabrication

Silicon To Silicon Anodic Bonding Using Evaporated Glass

Quality Of The Aluminium Press-on Contacts For Glass To Silicon Bonding

In Situ Investigation Of Precise High Strength Micro Assembly Using Au-Si Eutectic Bonding

Cavity Pressure Control For Critical Damping Of Packaged Micro Mechanical Devices

Hermeticity Testing Of Glass-silicon Packages With On Chip Feed Throughs

Packaging of ISFETs at the Wafer Level by Photopatternable Encapsulant Resins

Proposal For New Multichip-on-silicon Packaging Scheme

Basic Micro Module For Chemical Sensors With On Chip Heater And Buried Sensor Structure

New Method For Testing Hermeticity Of Silicon Sensor Structures

Flexible polysiloxane Interconnection Between Two Substrates For Microsystem Assembly

An Initial Experimental Study Of Rotating Micromechanical Liquid O-ring Pressure Seals

Monitoring plasma over-etching of Wafer-bonded Microstructures

A Multilayer Ceramic Package For Silicon Micromachined Accelerometers

A Rapid And Selective Anodic Bonding Method

Integrated Optical Encoder

A Silicon Optical Modulator with 5 MHz Operation for Fiber-In-The-Loop Applications

MHz Opto-mechanical Modulator

Two Dimensional Silicon Micromachined Optical Scanner Integrated With Photo Detector And Piezoresistor

An Electrostatically Operated Torsion Mirror For Optical Switching Device

Deformable Micromirror Devices As Phase Modulating High Resolution Light Valves

Integration Of Surface Micromachined Polysilicon Mirrors And A Standard Cmos Process

A High-resolution Laser-based Deflection Measurement System For Characterizing Aluminum Electrostatic Actuators

Design And Fabrication Of Micro Mirror Supported By Electroplated Nickel Posts

Magnetic Small Flying Machines

Fully Batch Fabricated Magnetic Microactuators Using A Two Layer Liga Process

Electromagnetic Linear Actuators With Inductive Position Sensing For Micro Relay, Micro Valve And Precision Positioning Applications

A Micromachined Permalloy Magnetic Actuator Array for Micro Robotics Assembly Systems

Magnetic Microactuation Of Torsional Polysilicon Structures

Electrostatic And Magnetoelastic Microactuation Of Si/sun 3/N/sub 4/ Bridges

Micromachined Devices For Optical Applications

Micromachined 1x2 Optical Fiber Switch

Surface-micromachined Movable SOI Optical Waveguides

Micromachined Optical Circular Gratings For Surface Light-emitting Devices

An Antenna-coupled Electric Wave Detector For Microwave And Infrared Ray

A Mechanical Splice For Fiber Ribbons

Thermally Controlled Magnetization Microrelay

Surface Micromachined Microengane As The Driver For Micromechanical Gears

Analysis Of A Micro-electric Generator For Microsystems

A Precision Flow Restrictor for Medical Infusion Theraphy

Design of a biological cell fusion device

Generating a microplasma with porotts silicon

Gas Bubbles Electrolytically Generated At Microcavity Electrodes (MCE) Used For The Measurement Of The Dynamic Surface Tension In Liquids

A Piezoelectric pseudo-static Actuator For Large Displacement Under AC Voltage Operation

Bending and Expanding Motion Actuators

Fabrication And Characterization Of PZT Thin Films For Micromotors

Direct Frictional Driven Surface Acoustic Wave Motor

Silicon Microfabricated Horns for Power Ultrasonics

Positioning To Nanometer Resolution With Ultrasonic Actuators

Piezoelectric Cantilever Beams Actuated By PZT Sol-gel Thin Film

Self-excited Piezoelectric Cantilever Oscillators

Basic Characteristics Of A Piezoelectric Buckling Type Of Actuator

Fabrication Of An Electrostatic Microactuator With An S-shaped Film

Electrostatically Excited Diaphragm Driven As A Loudspeaker

Batch Fabrication Of Mechanical Platforms For High Density

Capacitance Based Tunable Micromechanical Resonators

Electrical Levitation For Micromotors And Microaccelerometers

Non-invasive Blood Glucose Monitoring

Ultrasensitive Biosensors

Optimization And Stabilization Of An Ultra Sensitive Biosensor For The Determination Of Inorganic Phosphate By Enzymatic Amplification

Transcutaneous Lactate Monitoring With A Micro-planar Amperometric Biosensor

Flow-Calorimetric Biosensing Of Zinc(II) Ions With Use Of Thermolysin-immobilized Beads

Improvements In The Stability Characteristics Of Biosensors Using Protein-polyelectrolyte Complexes

Microdialysis System For Continuous Glucose Monitoring

Two Amperometric Biosensors As Liquid Chromatographic Detectors For On-line Monitoring Of Carbohydrate Consumption And Ethanol Production In Bioprocesses

Kinetics Of Electron Transfer Of A Bioelectrochemical Reaction In Binary Organic Solvent-water Media

Organophosphorus Pesticide Analysis Using Solid State Sensors

Immobilization Of Enzymes Onto Thienoviologen-modified Gold Electrodes

Enzyme Electrodes For Determination Of Phenol Concentration

A New Method For The Controlled Immobilization Of Enzyme In Inorganic Gels (laponite) For Amperometric Glucose Biosensor

Electron Transfer Principles In Amperometric Biosensors: Direct Electron Transfer Between Enzymes And An Electrode

An Integrated Thermal Sensor Array For Multianalyte determination demonstrated With Glucose, Urea And Penicillin

On Line Monitoring Of Glucose, Lactate, Glutamine, And Glutamate During Mammalian Cell Cultivations With Integrated Micro Biosensor array

Microstructured Polymer-based Transistors Obtained By Means Of Scanning Electrochemical Microscopy: Applications As Transducers In Biosensors

A Holographic Biosensor

A Disposable Sensor And Its Applications In The Measurements Of Glucose And Lead

God Films By Pulsed Laser Ablation

A Microsensor With Integrated Heat Sink And Flow Guide For Gas Flow Sensing Applications

Response Speed Optimization Of Thermal Gas-flow Sensors For Medical Application

Influence Of Design Geometry And Packaging On The Response Of Thermal Cmos Flow Sensors

Design Of Integrated Thermal Flow Sensors Using Thermal Sigma-delta Modulation

The spl mu/-Flown- A Novel Device Measuring Acoustical Flows

Silicon Tube Structures For A Fluid Density Sensor

A Battery Operated Microsystem For Flow Measurements

A Polysilicon Flow Sensor For Gas Flowmeters

Liga And Related Technologies For Industrial Application

Silicon Fusion Bonding and Deep Reactive Ion Etching a New Technology for Microstructures

A Novel Etch-diffusion Process For Fabricating High Aspect Ratio Si Microstructures

The Black Silicon Method V: A Study Of The Fabricating Of Movable Structures For Micro Electromechanical Systems

Low-cost Technology For Multilayer Electroplated Parts Using Laminated Dry Film Resist

High Resolution Shadow Mask Patterning In Deep Holes And Its Application To An Electrical Wafer Feed-through

The Formation Of Electroplating Molds By Reactive Ion Etching

Diode Integrated Capacitive Accelerometer with Reduced Structural Distortion

ISAAC -- Integrated Silicon Automotive Accelerometer

Novel Process For A Monolithic Integrated Accelerometer

An Integrated Force-balanced Capacitive Accelerometer For Low-G Applications

A Piezoresistive Silicon Accelerometer With Monolithically Integrated CMOS-circuitry

A High-performance, Low Cost Capacitive Accelerometer Trimmed Using Nonvolatile Potentiometers (EEPOT's)

Improvement Of Novel NRLM Method For Accelerometers Characterization To The Range Of 10/sup 2/m/s/sup 2/

A High-accuracy Multi-element Silicon Barometric Pressure Sensor

Surface Micromachined Capacitive Differential Pressure Sensor With Lithographically-defined Silicon Diaphragm

A Fully Integrated Surface Micromachined Pressure Sensor With Low Temperature Dependence

Capacitive Silicon Differential Pressure Sensor

Integrated Pressure Sensor With Remote Power Source And Remote Readout

Capacitive Pressure Sensor Mock-up Without Compensation Circuits

Self-excited Force Sensing Microcantilevers With Piezoelectric Thin Films For Dynamic Scanning Force Microscopy

Lateral Force Measurements In A Scanning Force Microscope With Piezoresistive Sensors

Microelectromechanical Scanning Tunneling Microscope

An Acoustic Tactile Sensing Element with Five Dimensional Sensitivity

A CMOS Compatible Traction Stress Sensing Element For Use In High Resolution Tactile Imaging

Integration Of A Large Tip With High Aspect Ratio On An XY-Micro Stage For AFM Imaging

Silicon Three-axial Tactile Sensor

A Miniaturised Fabry Perot AFM Sensor

A Non-contact Inductive Position Sensor For Use In Micro Machines

A Micromachined Sub-micrometer Photodiode For Scanning Probe Microscopy

Performance Definition And Standardisation Of Electronic Noses

Analysis Of Complex Gas Mixtures By Pattern Recognition With Polymer Based Quartz Microbalance Sensor Arrays

Evaluation Of Dynamic Sensor Signals By Artificial Neural Networks

A Calibration Technique For An Electronic Nose

Gas Identification Using Oxide Semiconductor Gas Sensor Array and Neural-network Pattern Recognition

Screening Of Irradiated Tomatoes By Means Of An Electronic Nose

A Practical Use Of Electronic Noses: Quality Estimation Of COD Fillet Bought Over The Counter

Multisensor Microsystem For Contaminants In Air

Fuzzy Neural Networks For Gas Sensing

Linearisation In Multicomponent Analysis Based On A Hybrid Sensor-array With 19 Sensor Elements

Sensor Array Recognition Of Varieties Of A Same Wine

Study on Flexible Neural Network for Olfactory Sensory System

Hydrogen-Sensitive Breakdown Voltage In The I-V Characteristics Of Tin Dioxide-based Semiconductors

Influence Of The Interaction Between Molecules On The Response Of A Metal-oxide-silicon Carbide, Mosic, Sensor

In Situ Modification Of The NO/sub x/ And CO Sensitivity Of Thin Pt-gate MOSFET's

The Detection Of Mixtures Of NOx's With Hydrogen Using Catalytic Metal Films On The Sandia Robust Sensor With Pattern Recognition

Langmuir Analysis On Hydrogen Gas Response Of Palladium-gate Fet

Thin platinum gate field effect transistors as ammonia sensors in liquid

Fast Responding High Temperature Sensors For Combustion Control

Diamond Microelectronic Gas Sensors

Detection Of Hydrogen From Dissolved Gases In Transformer Oil By Pd/Pt Misfet

Micromachining Chemical And Biochemical Analysis And Reaction Systems On Glass Substrates

Integration Of A Micro Liquid Chromatograph Onto A Silicon Chip

Continuous Sample Preparation Using Free-flow electrophoresis On A Silicon Microstructure

A Mems-based Miniature DNA Analysis System

A Microfabricated, Electrochemiluminescence Cell For The Detection Of Amplified DNA

Different Couplings Of Electrochemical Chip Sensors With Actuators In Microanalytical Fluidic Systems

Sensor Controlled Processes In Chemical Microreactors

A Planar Microfabricated Fluid Filter

Odor-source Localization In Clean Room By Autonomous Mobile Sensing System

The mechanism of the response of lipds mimicking olfactory sensors to odorants

Pattern Recognition Using Gasmodulation

Application Of Plasma Polymer Film Coated Sensors To Gas Identification Using Linear Filters

Solid Electrolytes For Gas Sensing At High Temperatures. Multi Electrode Setup To Analyze Gas Mixtures

Integrated Sensor Array For Gas Analysis In Combustion Atmospheres

Multisensor System For Partial Pressure Ratios Of Gas Species

Multi-frequency Measurements Of Organic Conducting Polymers For Sensing Of Gases And Vapours

Nonlinear Preprocessing for Smart Chemical Sensing Systems

Thermal Analysis And Design Of A Micro-hotplate For Integrated Gas Sensor Applications

Optimized Temperature Pulse Sequences For The Enhancement Of Chemically-specific Response Patterns From Micro-hotplate Gas Sensors

Low Power Micro Gas Sensor

Selected-area Deposition Of Multiple Active Films For Conductometric Microsensor Arrays

Design Of The Interface Electronics For An Integrated Microsensor For The Preventive Detection Of Water Condensation

Si-planar-pellistor: Designs For Temperature Modulated Operation

A New Method To Measure The Absolute-humidity Independently Of The Ambient Temperature

Selective And Sensitive Detection Of Volatile Organic Compounds In Plasma Film Technology With Amino Acids And Fluoropolymers

Enhanced Electrochemical Performance Of Solid-state Ion Sensors Based On Silicone Rubber Membranes

Improved stability of solid-state ion-selective sensors by incorporation of lipophilic silver-calix[4] arene complexers within polymeric films

New Solvent System For The Improved Electrochemical Performance Of Screen-printed Polyurethane Membrane-based Solid-state Sensors

Formation Of Self-assembled Monolayer Of Heme And Synthetic Hemopeptide On Gold: Interaction With Nitric Oxide And Carbon Monoxide

Nitrate And Bicarbonate Selective Chemfets

Application Of Sol-gel And Laser Evaporation Methods To Obtain Thin Gas Sensitive Films

Acrylated Polyurethane As An Alternative Ion-selective Membrane Matrix For Chemical Sensors

Introduction Of Molecularly Imprinted Polymers As Recognition Elements In Conductometric Chemical Sensors

Behaviour Of Cryptophane Molecules In Gas Media

Mass Sensitive Detection Of CO/sub 2/ By Aminogroup-functionalized Polymers

Organic Vapor Sensitivity In A Porous Silicon Device

Mems: What Lies Ahead?

Special Features Of Automotive Onboard Sensors

Pharmacia Biosensor - A Technological Success With Commercial Potential

Metal Oxide Sensors

TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers

Integration Of Surface Micromachined Polysilicon Mirrors And A Standard Cmos Process

Content Provider	IEEE Xplore Digital Library
Author	Fischer, M. Nagele, M. Eichner, D. Schollhorn, C. Strobel, R.
Copyright Year	1995
Description	Author affiliation: Universitat Stuttgart (Fischer, M.)
Abstract	This paper describes the integration of surface microma chining with polysilicon and a standard CMOS process with aluminium gates. A demultiplexer circuit for addressing a micromachined mirror out of a line of eight mirrors is realized as example. The mirrors are electrostatically deflectable with driving voltages of about 20 V. A diffused p-well is used as counter electrode. Due to the properties of the applied p-well CMOS process with aluminium gates a complete integration of the CMOS process and the surface micromachining is necessary. The applied process is described.
Starting Page	305
Ending Page	307
File Size	554091
Page Count	3
File Format	PDF
ISBN	9163034735
DOI	10.1109/SENSOR.1995.717179
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1995-06-25
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Mirrors CMOS process Micromachining Aluminum Circuits Silicon Metallization Actuators Electrodes CMOS technology
Content Type	Text
Resource Type	Article

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