NDLI: RS9000, a novel MEMS accelerometer family for Mil/Aerospace and safety critical applications

Content Provider	IEEE Xplore Digital Library
Author	Stauffer, J.-M. Dietrich, O. Dutoit, B.
Copyright Year	2010
Description	Author affiliation: Colibrys (Switzerland) Ltd., Maladière 83, 2000 Neuchâtel, Switzerland (Stauffer, J.-M.; Dietrich, O.; Dutoit, B.)
Abstract	Mid accuracy navigation and control systems require gyros and accelerometer to predict the position of a moving object in free space. Accelerometers are used to perform initial levelling and correct the gyro drift on the move. Typically, accelerometer with a range of ±10g with overall bias stability better than 2 mg and scale factor composite repeatability of better than 1000 ppm is required for the AHRS application. Current solutions in the market are mainly based on either vibrating quartz structures or traditional precision mechanics. These solutions suffer from high cost and fragility. MEMS is an inherently rugged technology and has great potential to bring forth novel solutions on the harsh environment and safety critical applications and enable new solutions due to its size, ruggedness and potential cost benefits. We report a new technological platform termed $IRIS^{™}$ and a new accelerometer product based on that is called RS9000 family. RS9000 is interfaced with an open-loop electronic circuit and is comprised of a novel MEMS element designed specifically for high bias stability. RS9010 is a ±10g accelerometer with in run bias stability of better than 120µg, long term composite bias repeatability of better than 1.5mg, scale factor repeatability of 400ppm and vibration rectification of better than $65µg/g^{2}.$ To our knowledge, this is the highest accuracy reported for a MEMS sensor operating in open-loop.
Starting Page	1
Ending Page	5
File Size	876853
Page Count	5
File Format	PDF
ISBN	9781424450367
ISSN	21533598
DOI	10.1109/PLANS.2010.5507138
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-05-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Aerospace safety Micromechanical devices Accelerometers Circuit stability Navigation Control systems Costs Iris Electronic circuits Vibrations
Content Type	Text
Resource Type	Article

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