NDLI: Virtual fab technology utility simulation and its application to 300mm CR facility design and energy reduction

Content Provider	IEEE Xplore Digital Library
Author	Masuda, T. Samata, S. Mikata, Y.
Copyright Year	2005
Description	Author affiliation: Toshiba Corp. Semicond. Co., Yokohama (Masuda, T.; Samata, S.; Mikata, Y.)
Abstract	A new concept for facility design and electric power/energy analysis is introduced We developed the virtual fab simulator comprising of the lot flow simulator and the utility simulator called as FRS, fab resource simulator. With this simulator, we can estimate more accurate utility, and evaluate the reduction items. N2 facility size, for example, can be reduced by over 50% compared with the conventional method. The simulator also can be applied to analyzing the electric power consumptions of tools and reveals that the idle state power occupies approximately 1/3 of the total tool consumptions. Thus the virtual fab simulator is quite useful for efficient facility design and its analysis
Sponsorship	IEEE Electron Devices Soc. IEEE Components Packaging and Manuf. Technol. Soc., Semicond. Equip. & Mater. Int. (SEMI) Soc. of Appl. Phys. of Japan
Starting Page	17
Ending Page	20
File Size	447903
Page Count	4
File Format	PDF
ISBN	0780391438
DOI	10.1109/ISSM.2005.1513285
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2005-09-13
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Chromium Analytical models Semiconductor device modeling Costs Production Design methodology Large scale integration Safety Global warming Computer integrated manufacturing
Content Type	Text
Resource Type	Article

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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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