NDLI: Performance of MEMS inertial sensors

Content Provider	IEEE Xplore Digital Library
Author	Kourepenis, A. Borenstein, J. Connelly, J. Elliott, R. Ward, P. Weinberg, M.
Copyright Year	1998
Description	Author affiliation: Charles Stark Draper Lab. Inc., Cambridge, MA, USA (Kourepenis, A.)
Abstract	Advanced microfabrication techniques have produced small, low-cost silicon inertial sensors of high performance, ruggedness, and inherent symmetry. When integrated with Applications Specific Integrated Circuits (ASIC's), the sensors fit in a 3 cm per side flat pack and operate from a single 5 Vdc supply. They have been evaluated in automotive anti-skid and traction control systems, and in guided munitions. Multi-Chip Module (MCM) versions instruments enable guided munitions to improve the accuracy of the Navy 5"/54 gun platform. These sensors are fabricated using a dissolved wafer process that features single crystal silicon anodically bonded to a glass substrate, resulting in a sensor die size approximately 1 mm. Uncompensated bias and scale factor performance of 0.5/spl deg//s and 1.0% for the gyroscope, and 30 mg and 0.5% for the accelerometer are nominally demonstrated over the temperature range of -40/spl deg/C to +85/spl deg/C. Stability over smaller temperature ranges of 0.5/spl deg/C has surpassed 10/spl deg//hr(0.003/spl deg//s) in overnight (6 hour) tests, while the companion accelerometer nominally demonstrates sub milli-g performance. Angle random walk of 0.25/spl deg///spl radic/h is typical for the gyros with best to date performance of 0.05/spl deg///spl radic/h observed, while the accelerometers provide velocity random walk of 5 cm/s//spl radic/h. When compensated for performance across the temperature range of -40/spl deg/C to +85/spl deg/C, instrument scale factor performance surpasses 200 ppm stability, and bias uncertainty is less than 50/spl deg//hr and 1 mg for the gyro and accelerometer respectively. The robustness of these demonstrated in the ability to survive air guns tests in excess of 60000 g. This paper discusses measured and performance, with the principal focus on recent gyro and accelerometer instrument test results. Associated electronics, controls, and applications issues are also addressed.
Starting Page	1
Ending Page	8
File Size	825909
Page Count	8
File Format	PDF
ISBN	0780343301
DOI	10.1109/PLANS.1998.669861
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-04-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Accelerometers Instruments Temperature distribution Testing Silicon Weapons Sensor phenomena and characterization Temperature sensors Stability
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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