NDLI: A new high performance sigma-delta MEMS accelerometer for inertial navigation

Content Provider	IEEE Xplore Digital Library
Author	Ullah, P. Ragot, V. Zwahlen, P. Rudolf, F.
Copyright Year	2015
Description	Author affiliation: Sagem, Argenteuil, France (Ullah, P.; Ragot, V.) \|\| Colibrys, Yverdon-les-Bains, Switzerland (Zwahlen, P.; Rudolf, F.)
Abstract	MEMS accelerometers have proven high reliability, cost-effectiveness and versatility in recent years for consumer grade applications. Sagem and Colibrys have long been involved in MEMS accelerometers, with the ACSIL sensor that has been around for over 20 years on APIRS Attitude and Heading Reference Systems and more recently the MS90xx product family. MEMS sensors have been expected to reach inertial navigation grade performance for some years, however very few indeed have been up to the task. In this paper, we present the latest capacitive spring mass sigma-delta closed-loop accelerometer design by Sagem and Colibrys. We will present the key concepts for high performance, system architecture and the experimental results obtained on our prototypes. Compared to previous publications, performance has been significantly improved thanks to improvements in MEMS design, packaging and electronic control. The resulting design features compact size despite full digital electronic integration, excellent robustness to shocks and vibrations, and unmatched performance for a MEMS accelerometer. Great emphasis was placed on having an autonomous sensor, requiring only power supplies and a digital communication interface. High performance is thus achieved independently of external high precision components such as voltage references or A/D converter.
Starting Page	1
Ending Page	13
File Size	210780
Page Count	13
File Format	PDF
ISBN	9781467367387
ISSN	23773480
DOI	10.1109/InertialSensors.2015.7314257
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2015-09-22
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers Micromechanical devices Inertial navigation Laser stability Sensors Electrostatics Thermal stability
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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