NDLI: MEMS inertial rate and acceleration sensor

Content Provider	IEEE Xplore Digital Library
Author	Hulsing, R.
Copyright Year	1998
Description	Author affiliation: Dept. of Instrum. Syst., AlliedSignal, Redmond, WA, USA (Hulsing, R.)
Abstract	Development of the /spl mu/SCIRAS/sup TM/ (pronounced micro-Cyrus) multisensor for a period of over six years has produced a practical MEMS Inertial Measurement Unit (IMU). Using only three silicon sensors, a full-up IMU suitable for tactical grade navigation and guidance applications has been achieved. Iterative improvements in silicon sensor design and bulk micromachining processes have matured to the point where an IMU with an attractive price/performance ratio is now producible. This paper summarizes the design features and test results for an IMU with <100 deg/hr performance. Test results are shown for rate bias and acceleration bias over temperature. Production of this initial member of the /spl mu/SCIRAS product family begins in 1998 to support applications including guided artillery shells, technology insertion to decrease missile costs, navigation of remotely-piloted vehicles, dismounted soldier location devices and other navigation aids. The small size of this silicon multisensor and its ability to measure both angular rotation rate and linear acceleration provides a useful advantage in product packaging, cost, size, and system testing. The /spl mu/SCIRAS Inertial Sensor Assembly (ISA) is housed in a 2 cubic inch package weighing less than 5 ounces (140 grams) and requiring less than 0.8 W of power. Continuing development will lead to greatly improved performance on the order of 1 deg/hr at very low prices in high-volume production.
Starting Page	169
Ending Page	176
File Size	569485
Page Count	8
File Format	PDF
ISBN	0780343301
DOI	10.1109/PLANS.1998.670038
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-04-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Micromechanical devices Acceleration Silicon Navigation Testing Life estimation Production Costs Packaging Measurement units
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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