NDLI: SiMMA/sup TM/ accelerometer for inertial guidance and navigation

Content Provider	IEEE Xplore Digital Library
Author	Leonardson, R. Foote, S.
Copyright Year	1998
Abstract	This paper presents recent accomplishments in SiMMA/sup TM/ silicon micromachined accelerometers using vibrating beam accelerometer (VBA) technology, focusing on achieving navigation grade performance with reduced size and lower cost. Guidance and navigation system applications have continued to require smaller, lower-cost accelerometers. High reliability and long term stability in temperature modeled systems are also in demand. Available navigation grade accelerometers cannot meet all of these inertial measurement unit (IMU) requirements. Direct digital system usage of the SiMMA/sup TM/ accelerometer output reduces system level IMU cost by eliminating the need for digitizers (or A/D conversion), their analog calibration costs, resolution limitations, and their instability. High performance silicon micromachined vibrating beam SiMMA/sup TM/ accelerometers best meet these next-generation IMU accelerometer requirements. The SiMMA/sup TM/ accelerometer presented is a silicon micromachined VBA that converts an applied analog acceleration force directly into frequency modulated electronic signals for direct use in digital strapdown systems. Basic theory of operation is presented. New accelerometer development uses a monolithic single proof mass with integrated dual double-ended tuning forks (DETFs), for differential detection and improved common mode performance. Presently, accelerometer and integrated electronics are packaged in a hermetic metal case for long term reliability with gas damping for vibration control. Units have been designed and tested for programs comprising tactical (100 g) through navigation (20 g) range and performance grade applications.
Starting Page	152
Ending Page	160
File Size	598158
Page Count	9
File Format	PDF
ISBN	0780343301
DOI	10.1109/PLANS.1998.670036
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1996-04-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Accelerometers Navigation Silicon Costs Stability Temperature Measurement units Digital systems Calibration Acceleration
Content Type	Text
Resource Type	Article

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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