NDLI: Numerical simulation of the electrode impedance effect in capacitive radio frequency discharges

Content Provider	IEEE Xplore Digital Library
Author	Engelhardt, M. Ziegler, D. Brinkmann, R.P. Mussenbrock, T. Yamazawa, Y.
Copyright Year	2010
Description	Author affiliation: Tokyo Electron AT Ltd., Yamanashi 407-0192, Japan (Yamazawa, Y.) \|\| Ruhr University Bochum, D-44780 Bochum, Germany (Engelhardt, M.; Ziegler, D.; Brinkmann, R.P.; Mussenbrock, T.)
Abstract	The heating of electrons in asymmetrically driven capacitive rf discharges is directly connected to the phenomenon of excitation of the plasma series $resonance.^{1,2}$ It has been shown by means of careful measurements that the resonant increase of harmonics in the plasma current (even in the case of strongly sinusoidal driving voltage) leads to an increase of the electron $density.^{3}$ It has been also shown that the external circuit of the system, i.e., the matching unit, stray capacitance, and cable inductance, significantly influence the resonant behavior of the system. Therefore, it is possible to increase the electron density by detuning the resonances using an additional external circuit (under constant conditions). That is what is called the "electrode impedance $effect".^{4}$ In this contribution we present results from a self-consistant numerical simulation.
Starting Page	1
Ending Page	1
File Size	179073
Page Count	1
File Format	PDF
ISBN	9781424454747
ISSN	07309244
e-ISBN	9781424454761
e-ISBN	9781424454754
DOI	10.1109/PLASMA.2010.5534137
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-06-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Numerical simulation Electrodes Impedance Radio frequency Resonance Electrons Plasma measurements Plasma density RLC circuits Heating
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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