NDLI: Diagnosis of microwave argon plasma at low pressure

Content Provider	IEEE Xplore Digital Library
Author	Zhang, Guixi Wang, Shumin Zhang, Qing
Copyright Year	2010
Description	Author affiliation: Gas Discharge and Plasma Laboratory, Dept. of Electrical Engineering, Tsinghua University, Beijing 100084, China (Zhang, Guixi; Wang, Shumin; Zhang, Qing)
Abstract	Argon plasma is generated with a microwave plasma $equipment^{1}$ at 2000 Pa and 500 Pa. We use Mach-Zehnder Interferometry to measure the electron density distribution of the plasma; and use a spectrometer to survey the electron temperature and other components of plasma. From the spectrum we find a considerable constitution of free oxygenic radicals such as free OH radicals, free NO radicals and so on. From Boltzmann fitting curve we calculate that the electron temperature of the argon plasma is about 0.7eV at 2000Pa and about 3.5eV at 500Pa when microwave power is 7kW, and figure out curve of the electron temperature changing with the power supplied at 500Pa. With the Mach-Zehnder interferometry we get the interferograms and work out that the electron density distribution is roughly uniform in the whole plasma as the power ranges from 3kW to 7kW
Starting Page	1
Ending Page	1
File Size	166199
Page Count	1
File Format	PDF
ISBN	9781424454747
ISSN	07309244
e-ISBN	9781424454761
e-ISBN	9781424454754
DOI	10.1109/PLASMA.2010.5533978
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2010-06-20
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Microwave measurements Temperature measurement Plasma temperature Argon Atmospheric measurements Density measurement
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
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9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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