NDLI: Solid state pulsed power systems for plasma applications

Content Provider	IEEE Xplore Digital Library
Author	Gaudreau, M.P.J. Casey, J.A. Mulvaney, J.M. Kempkes, M.A. Hawkey, T.J.
Copyright Year	2000
Description	Author affiliation: Diversified Technol. Inc., Bedford, MA, USA (Gaudreau, M.P.J.)
Abstract	Summary form only given. Diversified Technologies, Inc. (DTI) has developed and patented solid state technology to provide fast, high power opening and closing switches. These switches are modular, and can be combined in series and/or in parallel to provide a wide range of voltage, current, and power handling capabilities. To date, DTI has built solid state, hard switch pulsed power systems with at 1 kV to 160 kV, and peak power levels up to 70 MW, and capable of pulse frequencies from DC to 400 kHz. Initial applications of this capability have been for providing repetitive pulses of electrical power for RF amplifier systems (klystrons, TWTs, and gyrotrons) and for plasma processing. This paper describes the basic design and performance of these solid state modulators. Specific focus is placed on application of this pulsed power technology to plasma processes, such as plasma immersion ion implantation (PIII) for both semiconductors and metal treatment. Examples of specific system applications include the use of DTI modulators for high volume diamond-like coating (DLC) and plasma source ion implantation (PSII) processes in metal processing, and high voltage, high peak power(100 kV, 500 A) modulators for semiconductor process research and operations.
File Size	110142
File Format	PDF
ISBN	0780359828
ISSN	07309244
DOI	10.1109/PLASMA.2000.855122
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-06-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Pulse power systems Solid state circuits Plasma applications Switches Pulse amplifiers Diffusion tensor imaging Plasma immersion ion implantation Voltage Plasma materials processing Plasma sources
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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