NDLI: Laser initiation and radiofrequency sustainment of seeded air plasmas

Content Provider	IEEE Xplore Digital Library
Author	Scharer, J. Cao, R. Gui, H. Kelly, K. Paller, E. Sund, R.
Copyright Year	2000
Description	Author affiliation: Dept. of Electr. & Comput. Eng., Wisconsin Univ., Madison, WI, USA (Scharer, J.)
Abstract	Summary form only given. Seeded gas plasmas and air constituents have been created by a 193 nm laser and radiofrequency sources. We have obtained 10/sup 14//cm/sup 3/ plasma densities with initial electron temperatures of 0.3 eV in TMAE (tetrakis (dimethylamino) ethylene) by laser photoionization. We developed a fast Langmuir probe analysis of plasma decay independent of ion species mix. Langmuir probe and optical emission data illustrating the density and temperature decay with TMAE mixed with nitrogen is presented. Simulations of antenna coupling, wave frequencies, wave propagation, and power absorption are compared with experimental observations for radiofrequency plasma sources. The source produces plasma densities of 2/spl times/10/sub 13//cm/sup 3/ in an 8500 cm/sup 3/ volume at electron temperatures of 5 eV in 10 mTorr Ar in a nonuniform magnetic field. Radiofrequency plasma production at pressures from 2700 Torr using Ar and laser initiated TMAE plasmas as seeds will be discussed.
File Size	93496
File Format	PDF
ISBN	0780359828
ISSN	07309244
DOI	10.1109/PLASMA.2000.854545
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2000-06-04
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Radio frequency Plasma temperature Plasma density Plasma sources Gas lasers Electrons Probes Plasma simulation Argon Ionization
Content Type	Text
Resource Type	Article
Subject	Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering

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