Please wait, while we are loading the content...
| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Godyak, V.A. Piejak, R.B. |
| Copyright Year | 1993 |
| Description | Author affiliation: Osram Sylvania, Inc., Danvers, MA, USA (Godyak, V.A.) |
| Abstract | Summary form only given. Spatially resolved probe measurements of the EEDF (electron energy distribution function) were made along the axial electric field in a capacitively coupled RF discharge at gas pressures between 0.01 and 1.0 Torr in argon. From these measurements the plasma potential, the EEDF and its integrals, such as plasma density and mean electron energy, were found as functions of the axial position x. Essentially divergent trends in the spatial distributions of the effective electron temperature were found at low gas pressures (p <0.1 torr) and at high (p >0.1 Torr) pressures. At low pressures, the effective electron temperature rose at the plasma periphery where the RF electric field was stronger, while at high pressures an opposite effect was found (the electron temperature decreased at the plasma periphery), although electron collisional heating was higher. These patterns of the electron temperature space distribution contradict those expected in the limiting case of high electron thermal conductivity at low pressure, where T/sub e(x)/ is expected to be constant, and in the case of the low thermal conductivity at high pressure, where T/sub e(x)/ should be a local rising function of E/sub (x)/. The paradoxical T/sub e/ distributions found here are due to both the nonlocality effect and a significant departure in the EEDFs from Maxwellian distribution. |
| File Size | 128636 |
| File Format | |
| ISBN | 0780313607 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1993.593463 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1993-06-07 |
| Publisher Place | Canada |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Electrons Temperature distribution Plasma temperature Thermal conductivity Plasma measurements Energy measurement Radio frequency Plasma density Energy resolution Spatial resolution |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
National Digital Library of India (NDLI) is a virtual repository of learning resources which is not just a repository with search/browse facilities but provides a host of services for the learner community. It is sponsored and mentored by Ministry of Education, Government of India, through its National Mission on Education through Information and Communication Technology (NMEICT). Filtered and federated searching is employed to facilitate focused searching so that learners can find the right resource with least effort and in minimum time. NDLI provides user group-specific services such as Examination Preparatory for School and College students and job aspirants. Services for Researchers and general learners are also provided. NDLI is designed to hold content of any language and provides interface support for 10 most widely used Indian languages. It is built to provide support for all academic levels including researchers and life-long learners, all disciplines, all popular forms of access devices and differently-abled learners. It is designed to enable people to learn and prepare from best practices from all over the world and to facilitate researchers to perform inter-linked exploration from multiple sources. It is developed, operated and maintained from Indian Institute of Technology Kharagpur.
Learn more about this project from here.
NDLI is a conglomeration of freely available or institutionally contributed or donated or publisher managed contents. Almost all these contents are hosted and accessed from respective sources. The responsibility for authenticity, relevance, completeness, accuracy, reliability and suitability of these contents rests with the respective organization and NDLI has no responsibility or liability for these. Every effort is made to keep the NDLI portal up and running smoothly unless there are some unavoidable technical issues.
Ministry of Education, through its National Mission on Education through Information and Communication Technology (NMEICT), has sponsored and funded the National Digital Library of India (NDLI) project.
| Sl. | Authority | Responsibilities | Communication Details |
|---|---|---|---|
| 1 | Ministry of Education (GoI), Department of Higher Education |
Sanctioning Authority | https://www.education.gov.in/ict-initiatives |
| 2 | Indian Institute of Technology Kharagpur | Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project | https://www.iitkgp.ac.in |
| 3 | National Digital Library of India Office, Indian Institute of Technology Kharagpur | The administrative and infrastructural headquarters of the project | Dr. B. Sutradhar bsutra@ndl.gov.in |
| 4 | Project PI / Joint PI | Principal Investigator and Joint Principal Investigators of the project |
Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon |
| 5 | Website/Portal (Helpdesk) | Queries regarding NDLI and its services | support@ndl.gov.in |
| 6 | Contents and Copyright Issues | Queries related to content curation and copyright issues | content@ndl.gov.in |
| 7 | National Digital Library of India Club (NDLI Club) | Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach | clubsupport@ndl.gov.in |
| 8 | Digital Preservation Centre (DPC) | Assistance with digitizing and archiving copyright-free printed books | dpc@ndl.gov.in |
| 9 | IDR Setup or Support | Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops | idr@ndl.gov.in |
|
Loading...
|