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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Pender, J. Buie, M. Vincent, T. Holloway, J. Brake, M.L. |
| Copyright Year | 1993 |
| Description | Author affiliation: Dept. of Nucl. Eng., Michigan Univ., MI, USA (Pender, J.) |
| Abstract | Summary form only given. The radial optical emission of an RF discharge was studied to determine the plasma uniformity in a parallel-plate system known as the GEC Reference Cell. Two argon lines were examined: the 7504 /spl Aring/ neutral line and the 4278 /spl Aring/ ion line. Paraxial rays from the discharge were telescoped down onto a 1024-channel intensified diode array by means of a 1-meter spectrograph. The detector was rotated by 90/spl deg/, which allowed the recording of the intensity of 1024 spatially distinct points parallel to the electrode surface at one wavelength. This method was used to map out the whole interelectrode plasma at pressures of 0.1, 0.25, 0.5, and 1.0 torr at 75, 100, 150, and 200 V/sub p-p/ for an argon flow of 20 sccm. |
| File Size | 141685 |
| File Format | |
| ISBN | 0780313607 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1993.593424 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1993-06-07 |
| Publisher Place | Canada |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Stimulated emission Radio frequency Argon Particle beam optics Plasmas Diodes Detectors Electrodes Surface waves Optical surface waves |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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