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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Bletzinger, P. |
| Copyright Year | 1993 |
| Description | Author affiliation: Aero Propulsion & Power Directorate, WPAFB, OH, USA (Bletzinger, P.) |
| Abstract | Summary form only given. In order to observe the inductive and capacitive modes at lower powers, a medium-size helical resonator (11" diam., 12.5" length, 11 turn coil with 6.25" diam.), with a nominal resonance frequency of 13.56 MHz and a characteristic impedance of 970 Ohms, was used as a plasma generator at RF input powers from 27 to 150 W. Gas pressure ranged from 0.005 to 1 Torr. Measuring forward and reflected power and standing wave ratio as a function of frequency, it was found that the capacitive mode resonance was lower in frequency than the inductive mode resonance by approximately 5 MHz. The inductive mode resonance was suppressed for low power and a low transformer ratio (3:11 and lower). At high transformer ratios (up to 1:22) the capacitive mode was suppressed, although at low pressures another mode appeared at much higher frequencies. As has been observed for inductive discharges, operation in the capacitive mode is characterized by the discharge extending outside the cavity, possibly to some grounded part; in the inductive mode the discharge is better confined to the cavity volume and has an annular profile across the tube diameter. |
| File Size | 120015 |
| File Format | |
| ISBN | 0780313607 |
| ISSN | 07309244 |
| DOI | 10.1109/PLASMA.1993.593462 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1993-06-07 |
| Publisher Place | Canada |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Resonance Plasma measurements Coils Resonant frequency Impedance Plasma properties Plasma waves Character generation Power generation Radio frequency |
| Content Type | Text |
| Resource Type | Article |
| Subject | Atomic and Molecular Physics, and Optics Condensed Matter Physics Electrical and Electronic Engineering |
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