NDLI: Scrubber clean induced device IDDQ fail

Content Provider	IEEE Xplore Digital Library
Author	Re-Long Chiu Higgins, J. Shu-Lan Ying Shih-Tzung Chang Chung, J. Dick, B. Lee, E.
Copyright Year	2012
Description	Author affiliation: WaferTech LLC, 5509 N.W. Parker St. Camas, WA 98607-9299 USA (Re-Long Chiu; Higgins, J.; Shu-Lan Ying; Shih-Tzung Chang; Chung, J.; Dick, B.; Lee, E.)
Abstract	IDDQ is an effective test method to screen out process related defects during chip probe (CP) test. Through failure analysis it was determined that some production wafers suffering minor yield loss in wafer edge for IDDQ failure was the result from inter layer dielectric cracks. Monitor wafers were processed and utilized for root cause finding using layer-by-layer inline KLA scan review, where the problem was found to be a scrubber clean tool used during a TiN glue layer post CVD clean stage. This caused the wafers to be impacted by process induced ESD damage. The scrubber clean stage is extensively used in the manufacture process to remove particles from the surface of wafer. The possible source of the ESD damage during scrubber clean was studied. After improving the scrubber clean process, the wafer edge yield loss with IDDQ failure was recovered.
Starting Page	1
Ending Page	4
File Size	646520
Page Count	4
File Format	PDF
ISBN	9781467309806
ISSN	19461550
e-ISBN	9781467309837
DOI	10.1109/IPFA.2012.6306293
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-07-02
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Electrostatic discharges Scanning electron microscopy Tungsten Dielectrics Tin Inspection Monitoring
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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