NDLI: Characterisation of industrial-scale remote PECVD SiN depositions

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2006 IEEE 4th World Conference on Photovoltaic Energy Conference

3rd World Conference onPhotovoltaic Energy Conversion, 2003. Proceedings of

Volume 3 - 2003

Volume 2 - 2003

3rd World Conference on Photovoltaic Energy Conversion

A gettering simulator: evaluating contamination and gettering processes

Startling photoluminescence quantum efficiencies from crystalline silicon

Optical mismatch in double AR coated c-Si, a simple theoretical and experimental correlation

Design criteria for amorphous/crystalline silicon heterojunction solar cells - a simulation study

Analysis of edge recombination for high-efficiency solar cells at low illumination densities

Impurity segregation to sink layer during phosphorus gettering

Interfacial structure and current transport properties of sputter-deposited ZnO:Al/c-Si heterojunction solar cells

Analysis of very thin high-efficiency solar cells

Energy level of minority carrier trap centers induced by light illumination in B-doped Cz-Si solar cells

Predicting multi-crystalline solar cell efficiency from life-time measured during cell fabrication

Characterization of laser-fired contacts processed on wafers with different resistivity

Influence of grain orientation on contact resistance at higher emitter resistances, investigated for alkaline and acid saw damage removal

Evaluation of the diffusion length in polycrystalline silicon by surface photovoltage technique

Impact of defect distribution and impurities on multicrystalline silicon cell efficiency

Quantitative correlation of the metastable defect in Cz-silicon with different impurities

Two-dimensional modelling of polycrystalline silicon thin film solar cells

Advanced lifetime spectroscopy: unambiguous determination of the electronic properties of the metastable defect in boron-doped CZ-Si

Edge shunt passivation in silicon solar cells by chemical etching investigated by lock-in thermography and CELLO

Quantitative analysis of the influence of shunts in solar cells by means of lock-in thermography

Investigation of various surface passivation layers using oxide/nitride stacks of silicon solar cells

Pure experimental determination of surface recombination properties with high reliability

Comprehensive analysis of the impact of boron and oxygen on the metastable defect in Cz silicon

Calibration and measurement of solar cells and modules by the solar simulator method in Japan

Comparative study on emitter sheet resistivity measurements for inline quality control

Minority carrier lifetime improvement in p-type silicon by oxygen related centers gettering at low temperatures: application to the heterojunction solar cell processing

Analysis of p/n junction profiles by electron beam induced current towards high efficiency thin-film poly-Si solar cells

Electrical property evaluation of polycrystalline silicon thin film on textured substrate

Lifetime improvements of multicrystalline silicon analysed by spatially resolved lifetime measurements

Solar cells in-line characterisation for industrial process

Surface passivation of silicon substrates using quinhydrone/methanol treatment

Platinum-diffusion: a method for the determination of vacancy profiles in EFG silicon

Fast initial light-induced degradation of Czochralski silicon solar cells

Assessing the role of transition metals in shunting mechanisms using synchrotron-based techniques

Recombination at a-Si:H/c-Si heterointerfaces and in a-Si:H/c-Si heterojunction solar cells

Characterisation of industrial-scale remote PECVD SiN depositions

Improved thermally stable surface and bulk passivation of PECVD SiN/sub x/:H using N/sub 2/ and SiH/sub 4/

An early deposited LPCVD silicon nitride: allowing the possibility of novel cell designs

P-type silicon heterojunction solar cells with different interfaces and surface structures

The influence of surface preparation on rear surface passivation of mc-Si by thermally treated direct PECVD silicon nitride

Highly moisture-resistive SiN/sub x/ films by catalytic chemical vapor deposition and their application to passivation and antireflection coating for crystalline Si solar cells

Passivation effect of SiN deposited by plasma chemical vapor deposition for thin film c-Si solar cells

Improvement of SiO/sub 2//Si interface properties using high-pressure H/sub 2/O vapor heating

Structural film characteristics related to the passivation properties of high-rate (>0.5 nm/s) plasma deposited a-SiN/sub x/:H

Temperature-dependent quantum efficiency analysis of recombination centers in silicon thin-film solar cells

Characterization of epitaxial silicon thin film solar cells on SSP substrate

Optimization of c-Si films formed by zone-melting recrystallization for thin-film solar cells

Multicrystalline LLC-Si thin film solar cells on low temperature glass

Application of PECVD-SiC as intermediate layer in crystalline silicon thin-film solar cells

Polycrystalline silicon films on ceramic substrates by aluminium-induced crystallisation process

Silicon films on ceramic substrates (SOCS): growth and solar cells

Electron beam crystallized silicon solar cells on glass substrates

Polycrystalline silicon on glass thin-film solar cell research at UNSW the seed layer concept

Very low temperature epitaxial growth n/sup +/ c-Si/p c-Si solar cells

Structural properties of polycrystalline silicon seed layers made on glass by solid-phase crystallisation

Electrical and optical properties of polycrystalline silicon seed layers made on glass by solid-phase crystallisation

Thin silicon solar cells fabricated on cost optimized float zone silicon

Optimization of P/sup +/ seeding layer for thin film silicon solar cell by liquid phase epitaxy

Silicon-on-ceramic monolithically interconnected solar cell modules

Silicon LPE on substrates from metallurgical silicon feedstock for large scale production

Hot-wire CVD thin silicon films on crystalline silicon for solar cell applications

LPE and VPE silicon thin film on porous sacrificial layer

Impurity and defect passivation in poly-Si films fabricated by aluminium-induced crystallisation

Low-temperature epitaxial Si absorber layers grown by electron-cyclotron resonance chemical vapor deposition

What is the most important growth parameter on crystal quality of the silicon layer by LPE method?

Very low temperature emitter growth n/sup +/p solar cells on 2 /spl mu/m poly-Si/Al/sub 2/O/sub 3/ substrates

Study of aluminum-induced crystallization process using sputtered Al layer

Microstructural investigation of polycrystalline silicon thin films re-crystallized by laser-diode

Silicon carbide barrier layer on ceramic substrates for crystalline silicon thin-film modules with an integrated series connection

Productions of Si and Ge thin film single crystalline growth by lateral grapho-epitaxy

Thin silicon cells using novel LASE process

Silicon liquid phase epitaxy for epilift solar cells

Fabrication of solar cells using the epilift technique

Recent progress on transfer-Si solar cells at ipe Stuttgart

10.21% polycrystalline silicon thin film solar cells on SiO/sub 2/ covered c-Si substrates

15.12% silicon thin film solar cell on p/sup ++/ c-Si substrate prepared by RTCVD

Study of SSP ribbon as polycrystalline silicon thin film solar cells' substrate material-preparation and performance

Over 10% efficient screen printed RGS solar cells

16% efficiency on encapsulated large area screen printed string ribbon cell

String ribbon silicon solar cells with 17.8% efficiency

Multiple ribbon growth using the string ribbon method

Factors affecting the performance of thin dendritic Web silicon front surface field (n/sup +/np/sup +/) solar cells

Texturing techniques and resulting solar cell parameters on tri-silicon material

Simulation of mechanical stress during bending tests for crystalline wafers

N-type multicrystalline silicon: a stable, high lifetime material

Novel concept for thin multi-crystalline silicon solar cell process

Thin monocrystalline silicon films for solar cells

A new type of spherical silicon solar cells with semi-concentrated reflector system

Analysis of grid disconnection effect on I-V characteristics in crystalline Si solar cells

Analysis of laser-fired local back surface fields using n/sup +/np/sup +/ cell structures

Gettering and poisoning of silicon wafers by phosphorus diffused layers

Progress in high-efficiency emitter-wrap-through cells on medium quality substrates

Rise of dislocation density in crystalline silicon wafers during diffusion processing

Dry PSG etching for multicrystalline silicon solar cells

Implementation of rapid thermal processing to achieve greater than 15% efficient screen-printed ribbon silicon solar cells

Application of screen printing processes for epitaxial silicon thin-film solar cells

Texturing of multicrystalline silicon with acidic wet chemical etching and plasma etching

Scanning Nd:YAG laser system for industrially applicable processing in silicon solar cell manufacturing

The RTCVD160 - a new lab-type silicon CVD processor for silicon deposition on large area substrates

Comparison of texturing methods for monocrystalline silicon solar cells using KOH and Na/sub 2/CO/sub 3/

Plasma etching for industrial in-line processing of c-Si solar cells

Low temperature contacting technique for improving rear surface passivation in silicon solar cells

Analysis of cell-process induced changes in multicrystalline silicon

N/sup +/-type versus P/sup +/-type, passivated and homogeneous emitter silicon solar cells

Record efficiency of 16.7% in EFG ribbon silicon

Low-temperature rear surface passivation schemes for >20% efficient silicon solar cells

A new generation of industrial crystalline silicon solar cells based on the OECO technology

Self-aligning, industrially feasible back contacted silicon solar cells with efficiencies >18%

Passivation and compatible device processing of APIVT-Si thin layers

Titanium dioxide film as a phosphorus diffusion barrier in silicon solar cells

Infrared emitter diffusion using thin and heavily-doped phosphorus source layers

Mechanical wafer stability enhancements and texturing effects of remote downstream plasma etching

Process development for back contact POWER silicon solar cells with emitter wrap through design

Hot-wire CVD n-type emitter on p-type crystalline Si solar cells

Large area monocrystalline silicon solar cell using SOD

Solar cells with annealed amorphous Si/sub 0,8/C/sub 0,2//Si heterojunction and a-SiC/sub x/:H backsurface passivation

Recent results on semi-transparent POWER cells

Highly efficient double side mechanically textured novel silicon solar cell concepts

A simplified process for isotropic texturing of mc-Si

Technology path to the industrial production of highly efficient and thin c-Si solar cells

A combination of boron gettering and phosphorous gettering in Fe-contaminated n+pp+ bifacial silicon cells

Application of fine electrode for high efficiency mc-Si solar cells over 18%

Interdigitated backside buried contact solar cells

Investigation of RTP and belt fired screen printed AL-BSF on textured and planar back surfaces of silicon solar cells

Progress of large area 18%-PEBSCO - silicon solar cells

The challenge to implement thin wafer potential with wire saw cutting technology

Simplified transfer process for high-current thin-film crystalline Si solar modules

Newly developed multicrystalline silicon wafer with diffusion length over 250 /spl mu/m

Screen printed c-Si thin film solar cells on insulating substrates

Comparison of dielectrics and iodine solution for monocrystalline and multicrystalline surface passivation

High efficiency gallium doped and boron doped multicrystalline silicon solar cells

Integrated series-interconnected thin-film Si solar cells with 6 V and 12 V output voltage

Designing a front contact ink for SiN/sub x/ coated polycrystalline Si solar cells

Nucleation control towards the poly-Si thin films with large grain size utilizing intermittent supply of dichlorosilane

Texturization of multicrystalline silicon wafers by chemical treatment using metallic catalyst

Rapid initial light-induced degradation of multicrystalline silicon solar cells

New large area PECVD-system for a-SiN:H deposition at 13.56 MHZ

Low cost fabrication for high efficiency monocrystalline silicon solar cells

New analysis method for crystalline silicon cells

Light trapping and optical losses in microcrystalline Si and micromorph solar cells

Roll-to-roll production of amorphous silicon based triple junction solar cells

Productions of amorphous Si and hybrid modules

Electrical and microstructural characterisation of microcrystalline silicon layers and solar cells

Microcrystalline silicon solar cells grown at 20-30 a/s by high-pressure silane-depletion plasma

Extremely high-rate deposition of silicon thin films prepared by atmospheric plasma CVD method with a rotary electrode

Solar cell research and development using the hot wire CVD process

Poly-Si cells at a deposition rate of more than 1 nm/s by hot-wire chemical vapour deposition

High efficiency thin film silicon hybrid solar cell module on 1 m/sup 2/-class large area substrate

Development of amorphous silicon/microcrystalline silicon tandem solar cells

Thin film solar modules based on amorphous and microcrystalline silicon

Thin film silicon solar cells on liquid crystal polymer substrate

Alternative gases and processes for amorphous and microcrystalline silicon etching

Light induced changes in two distinct defect states at and below midgap in a-Si:H

Light-soaking stability of nano-structure tailored silicon thin film solar cells

Enhanced light trapping in thin film silicon solar cells deposited on PET and glass

Electrochemically deposited zinc oxide for light trapping in thin film silicon solar cell

0.5 /spl mu/m-thick /spl mu/c-Si solar cell grown by photo-CVD on highly textured SnO/sub 2/

Photoinduced volume changes in doped a-Si:H films

Fabrication of the hydrogenated amorphous silicon films containing less hydrogen and its stability against light soaking

Chlorine containing hydrogenated amorphous silicon without optical band gap widening

Role of charged defects in the light-induced degradation of single junction a-Si:H solar cells

On the mechanism of light-induced open-circuit voltage increase in mixed-phase hydrogenated silicon solar cells

Fast and sensitive defect characterization and spectral response measurement of thin film silicon solar structures

High-quality a-Si:H films deposited at 0.7 nm/s by cluster suppressed plasma CVD method

Electron temperature control in silane plasma for fabricating highly stabilized hydrogenated amorphous silicon

Effect of substrate temperature and hydrogen dilution on thin silicon films deposited at low substrate temperatures

Investigation on the role of oxygen in /spl mu/c-Si:H thin film deposited with VHF-PECVD

High rate growth of preferentially orientated crystalline silicon films by ECR plasma CVD

High rate growth of micro-crystalline silicon by microwave-PECVD

The influence of various parameters on microcrystalline silicon films and solar cells by hot-wire CVD

Microcrystalline silicon for solar cells, deposited at high rate by VHF-GD at high pressure

High-speed growth of silicon thin films by EBEP-CVD using Si/sub 2/H/sub 6/

Microcrystalline silicon thin films using dc saddle-field glow discharge

Microcrystalline silicon films for solar cells obtained by gas-jet electron-beam PECVD method

Film structure dependence of electrical properties of microcrystalline silicon

Optical absorption in /spl mu/c-Si:H films induced by oxygen

Novel carbon source (1,3-disilabutane) for the deposition of microcrystalline silicon carbon

Hydrogenated silicon carbon films prepared by hot wire chemical vapor deposition using monomethylsilane

P-type microcrystalline SiC fabricated by rf plasma CVD with 40-MHz excitation

High quality a-Si/sub 1-X/C/sub X/:H window layers prepared by Cat-CVD method using graphite catalyzer under low thermal radiation conditions

Effect of gas pressure on hydrogenated amorphous silicon carbide films by hot-wire CVD

Wide gap and low resistive hetero-structured SiC/sub X/ films for wide gap window of heterojunction solar cells

High rate growth of microcrystalline silicon films assisted by high density plasma

Properties of microcrystalline silicon films deposited at high growth rate at different plasma excitation frequencies

Crystallographic control of microcrystalline silicon films in a SiF/sub 4//SiH/sub 4//H/sub 2/ plasma by VHF-PECVD

Modulation effect of plasma power on crystalline volume fraction of silicon films in the phase transition from a-Si:H to /spl mu/c-Si:H

Lateral crystallization of silicon films using Joule heating

Wide band gap buffer effect for amorphous silicon solar cell analyzed by BASREA measurement

Amorphous silicon solar cells at high deposition rates using newly developed PECVD

Fast and highly stabilized protocrystalline silicon multilayer solar cell

Thermal annealing characteristics of amorphous silicon-based solar cells incorporating stable protocrystalline silicon and unstable microcrystalline silicon at the onset of a microcrystalline regime

Development of glass substrates with tin oxide films for a-Si solar modules

High growth rate and gas utilisation in a-Si:H solar cells made with amplitude modulated VHF-CVD

Impact of sheet resistance and contact shading on 'Suns-V/sub OC/' measurements on thin-film solar cells

Impact of spectral effects on the electrical parameters of multijunction amorphous silicon cells

Fabrication technologies for large-area plastic-film-substrate solar cells

Analysis of microcrystalline silicon solar cells prepared by hot-wire and plasma-enhanced chemical vapor deposition

Influence of the crystalline fraction on the stability of nanocrystalline silicon solar cells

Microcrystalline silicon thin film solar cells prepared by hot wire cell method

A critical role of p/i interface in nanocrystalline single junction p-i-n solar cells

Modified pulsed PECVD technique for nano-crystalline silicon solar cells: an effect of i-layer growth temperature

Effect of TCO coated substrate and p-layer on performance of microcrystalline silicon solar cells

A study of single chamber RF-PECVD /spl mu/c-Si solar cells

Large area multi-zone type VHF-PCVD system for a-Si and /spl mu/c-Si deposition

Microcrystalline-Si solar cells by newly developed novel PECVD method at high deposition rate

Magnetron sputtered zinc stannate films for silicon thin film solar cells

Silicon solar cells and material near the transition from microcrystalline to amorphous growth

a-SiNet: the European Network on amorphous-silicon device technology

Improvement of light-trapping effect on microcrystalline silicon solar cells by using high haze transparent conductive oxide films

A role of a-Si:H buffer layer for controlling the impurity profiles near p/i interface of microcrystalline silicon solar cell

Improvement of microcrystalline silicon solar cell by insertion of buffer layer to TCO/p interface

Light scattering properties of SnO/sub 2/ and ZnO surface-textured substrates

3-dimensional optical model for thin film silicon solar cells

Impurity diffusion effect on p/i interface properties of p-i-n junction microcrystalline silicon solar cells

Investigation of the high efficiency microcrystalline silicon solar cell

Role of the glass/TCO substrate in thin film silicon solar cells

Investigations on the current matching of highly efficient tandem solar cells based on amorphous and microcrystalline silicon

First hot-wire deposited triple junction silicon thin film solar cell

Large area thin film Si tandem module production using VHF plasma with a ladder-shaped electrode

A-Si:H//spl mu/c-Si:H tandem solar cell by novel PECVD method

An investigation of amorphous silicon solar cells with a gettering layer

ESR studies of hydrogenated nanocrystalline silicon carbide

Evaluations of microcrystalline silicon cells by fast pole figure

Influence of argon on crystalline silicon film growth by ECR plasma CVD for solar cells

Present status of photovoltaic industries and issues in the future

Advances needed in standardisation of PV components and systems

Results of 12 years of module qualification to the IEC 61215 standard and CEC specification 503

Field test results on the stability of crystalline silicon photovoltaic modules manufactured in the 1990s

Development of recycling and reuse technologies for large-area Cu(InGa)Se/sub 2/-based thin-film modules

Multi layer materials for the encapsulation of thin film modules

Stability studies on 0.79 m/sup 2/ single junction and tandem a-Si:H PV modules fabricated by a batch process

New photovoltaic system exploited by the unique characteristics in thin film Si modules

Modelling long-term module performance based on realistic reporting conditions with consideration to spectral effects

Module international certification and marking first experiences

Improvement on actual output power of thin film silicon HYBRID module

Power and energy production of PV modules statistical considerations of 10 years activity

High-voltage bias testing of thin-film PV modules

On dynamic and static I-V characteristics of solar cell modules having low and high fill factors

An integrated design software for photovoltaic systems

Modelling shading on amorphous silicon single and double junction modules

Amorphous, mono- and poly-crystalline silicon PV modules: a comparative study of their relative efficiencies under various outdoor conditions

Green 3R-concept design for Cd-based PV modules

Thermography: quality control for module manufacturing

Degradation factor analysis of crystalline-Si PV modules through long-term field exposure test

Development of a recyclable PV-module: trial manufacturing and evaluation

Application of a generalized current/voltage model for solar cells to outdoor measurements on a SIEMEN SM 110-module

Long term reliability evaluation of PV module

Durasheet - a new high durability diaphragm sheet

Climatic impact on the efficiency of a copper indium diselenide module

A simple diagnosis system on site for solar power modules using pulse light

Study on shadow loss of crystalline Si PV module affected by scattering rate of solar irradiance

New methods for solar cells measurement by LED solar simulator

Development of the low cost and environmental friendly backing film for PV module

Research & development on recycling technology of photovoltaic power generation systems - social system for PV recycling

A field method for determining the efficiency of each face of a bi-facial photovoltaic module

Economic evaluation on fuzzy analytic hierarchy process model for recycling Cu(In,Ga)Se/sub 2/ PV modules

Research and development on recycling and reuse treatment technologies for crystalline silicon photovoltaic modules

PV-thermal domestic systems

Investigation of the degradation in field-aged photovoltaic modules

Building integrated photovoltaics (BIPV) module design & experience in Japan

Performance test of amorphous silicon modules in different climates: higher minimum operating temperatures lead to higher performance levels

Energy rating of PV modules: comparison of methods and approach

Effect of air mass factor on the performance of different type of PV modules

Characterization of the module/array simulator using I-V magnifier circuit of a pn photo-sensor

PV energy potential in Nepal Himalayas: analytical study on seasonal and spatial variation of solar irradiance for PV

Interconnecting micro controller for PV systems in Japan

Afrodite power and aesthetics for the built environment

A new type of scaled-down network simulator composed of power electronics

Minimizing energy shadow losses for large PV plants

The importance of sensors in the determination of BIPV parameters and installation energy yield

First results of the tetra-track system and control electronics

An empirical synthetic law between the modules energy output and the meteorological data

The experimental results of an islanding detection method for Japanese AC modules

Energy loss of photovoltaic system caused by irradiance and incident angle

Inverter undersizing in PV systems

Performance of photovoltaic modules in a temperate maritime climate

Preparation of meteorological data set throughout Japan for suitable design of PV systems

Investigating the seasonal performance of amorphous silicon single- and multi-junction modules

a-Si hybrid solar collector

Effective irradiance estimation for PV applications

Hazard analysis for the protection of PV manufacturing facilities

An integrated solar home system-history

Photovoltaic system performance statistical analysis

Development and estimate of PV tile

Efficiency degradation of c-silicon photovoltaic modules after 22-year continuous field exposure

Monolithically series integrated flexible PV modules manufactured on commodity polymer substrates

Volume 1 - 2003

Proceedings of 1994 IEEE 1st World Conference on Photovoltaic Energy Conversion - WCPEC (A Joint Conference of PVSC, PVSEC and PSEC)

Characterisation of industrial-scale remote PECVD SiN depositions

Content Provider	IEEE Xplore Digital Library
Author	Winderbaum, S. Leo, A.J. Shea, S.P. Koval, T.D. Kumar, B.
Copyright Year	2003
Description	Author affiliation: Shamash Australia Pty Ltd., Australia (Winderbaum, S.)
Abstract	Remote PECVD SiN deposition parameters have been optimised for a fired-through metallization process on multicrystalline silicon solar cells. The best pressure, gas ratio and deposition temperature resulted in cell efficiencies of up to 14.3% when used with a 30 Ohm/square emitter and above 15% for 40 Ohm/square diffusion. Fourier transform infrared spectroscopy revealed that, during firing, the films lost a significant proportion of their hydrogen content, providing good bulk and surface passivation. In all cases the refractive index was reduced by approximately 1% during firing. The parameter space that gives optimal conditions for the lighter emitter coincides with a region in which the refractive index can be varied, resulting in greater process flexibility.
Starting Page	1128
Ending Page	1130
File Size	451170
Page Count	3
File Format	PDF
ISBN	4990181603
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-05-11
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	PVSEC Advisory Committee
Subject Keyword	Silicon compounds Refractive index Metallization Photovoltaic cells Temperature Fourier transforms Infrared spectra Firing Optical films Hydrogen
Content Type	Text
Resource Type	Article

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