NDLI: Fabrication and characterization of RF-MEMS switch in V-band

Content Provider	IEEE Xplore Digital Library
Author	Thanh Mai Vu Prigent, G. Jinyu Ruan Rumeau, A. Pons, P. Plana, R.
Copyright Year	2009
Description	Author affiliation: University of Toulouse; INPT, UPS ; LAPLACE; ENSEEIHT, 2 rue Charles Camichel, F-31071, France (Prigent, G.) \|\| CNRS ; LAAS ; 7 avenue du Colonel Roche, F-31077 Toulouse, France (Thanh Mai Vu; Jinyu Ruan; Rumeau, A.; Pons, P.; Plana, R.)
Abstract	This paper presents a complete study from design to fabrication and characterization of a RF-MEMS switch implemented in Si-BCB technology. The topology of the switch is a cantilever which will be integrated into tunable filters for applications from W-frequency band to V-frequency band. Along the whole process, attention has been paid to correlate simulations (electromagnetic and mechanical) and technology parameters in order to ensure a reliable switch model. The measured RF performances of this component exhibit isolation around 15 dB at 60GHz in the up-state position and an insertion loss less than 2dB in the down-state.
Starting Page	202
Ending Page	205
File Size	873600
Page Count	4
File Format	PDF
ISBN	9781424428014
DOI	10.1109/APMC.2009.5385326
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-12-07
Publisher Place	Singapore
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Switches Fabrication Radiofrequency microelectromechanical systems Topology Filters Isolation technology Electromagnetic modeling Loss measurement Position measurement Electromagnetic measurements W-band Cantilever RF-MEMS switch Si-BCB technology tunable filter V-band
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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