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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Al Ahmad, M. Coccetti, F. Plana, R. |
| Copyright Year | 2007 |
| Description | Author affiliation: LAAS CNRS, Toulouse (Al Ahmad, M.; Coccetti, F.; Plana, R.) |
| Abstract | The behaviour of the piezoelectric materials is determined by its coefficient $d_{33}$ which describes the strain parallel to the polarization vector of the ceramics. Full sheet characterization is essential to understand material behavior when it's clamped on the substrate. In this work, full field 3D non- contact surface measurements based on optical interferometer from FOGALE Nanotech with vertical resolution down to 0.1 nm is used to measure the piezoelectric coefficients of PZT thin film. The measurements analysis predicts a reduction of 50% for the $d_{33}$ values. |
| Starting Page | 1 |
| Ending Page | 4 |
| File Size | 855646 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781424407484 |
| DOI | 10.1109/APMC.2007.4554764 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2007-12-11 |
| Publisher Place | Thailand |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Substrates Clamps Piezoelectric films Optical films Optical interferometry Piezoelectric materials Capacitive sensors Optical polarization Piezoelectric polarization Ceramics sensors material parameters MEMS |
| Content Type | Text |
| Resource Type | Article |
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