NDLI: Application of a membrane reactor and an ultra-short packed gas chromatographic column to optimize the gas selectivity of a resistive thin film gas sensor

Content Provider	IEEE Xplore Digital Library
Author	Sturmann, J. Junge, S. Benecke, W. Zampolli, S. Nicoletti, S.
Copyright Year	2003
Description	Author affiliation: Inst. for Microsensors, -actuators, und -systems, Bremen, Germany (Sturmann, J.; Junge, S.; Benecke, W.)
Abstract	A current problem various gas sensors have to deal with is the lack of selectivity against a single gas in the presence of gas mixture. This paper presents the application of a membrane reactor consisting of a permeable, porous silicon membrane combined with an ultra-short packed silicon gas chromatographic column (GCC) to optimize the gas selectivity for a resistive thin film gas sensor. Catalytic Pre-treatment enables the modification of the gas mixture chemistry to amplify the gas sensors response diversification. E.g. for resistive thin film gas sensors it is an advantage to convert CO into CO/sub 2/ or, in order to achieve a better selectivity to other gas components, to realise a temporal separation of the different gas species. A membrane reactor for pre-combustion and a GCC for the gas separation has been realized.
Starting Page	399
Ending Page	402
File Size	339090
Page Count	4
File Format	PDF
ISBN	0780377443
ISSN	10846999
DOI	10.1109/MEMSYS.2003.1189770
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-01-23
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Biomembranes Inductors Thin film sensors Gas detectors Silicon Gases Palladium Fabrication Microsensors Telephony
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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