NDLI: Monolithic high aspect ratio two-axis optical scanners in SOI

Content Provider	IEEE Xplore Digital Library
Author	Milanovic, V. Matus, G.A. Cheng, T. Cagdaser, B.
Copyright Year	2003
Description	Author affiliation: Adriatic Res. Inst., Berkeley, CA, USA (Milanovic, V.; Matus, G.A.)
Abstract	Fully monolithic silicon optical scanners are demonstrated with large static optical beam deflection in two axes. The main advantage of the scanners is their high frequency of operation for both axes. Namely, the actuators allow static two-axis rotation of a micromirror without the need for gimbals, or specialized isolation technologies. Each device is actuated by four orthogonally-arranged vertical combdrive rotators etched in the device layer of an SOI wafer, which are coupled by mechanical linkages and mechanical rotation transformers. The transformers allow larger static rotations of the micromirror from the combdrive-stroke limited rotation of the actuators, with a magnification of 1.7/spl times/ angle demonstrated. A device with a mirror diameter of 600 /spl mu/m exhibits lowest resonant frequencies of 4.9 kHz and 6.52 kHz for x-axis and y-axis, respectively. The static optical deflection of the x-axis up to 9.6/spl deg/ and of the y-axis up to 7.2/spl deg/, are achieved for <275 Vdc. Another type of device, designed for lower-voltage operation exhibits static optical deflection about the x-axis to 10.8/spl deg/ and about the y-axis to 11.7/spl deg/, for <85 Vdc. In the same device, lowest resonant frequencies were 1.69 kHz for the x-axis and 2.43 kHz for the y-axis.
Starting Page	255
Ending Page	258
File Size	404051
Page Count	4
File Format	PDF
ISBN	0780377443
ISSN	10846999
DOI	10.1109/MEMSYS.2003.1189734
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-01-23
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Actuators Micromirrors Transformers Resonant frequency Silicon Optical beams Isolation technology Etching Couplings Mirrors
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in