NDLI: An environmentally responsive microflow controller with double side tethered structure for the entrapment of hydrogel

Content Provider	IEEE Xplore Digital Library
Author	Baldi, A. Ming Lei Yuandong Gu Siegel, R.A. Ziaie, B.
Copyright Year	2003
Description	Author affiliation: Dept. of Electr. & Comput. Eng., Minnesota Univ., Minneapolis, MN, USA (Baldi, A.; Ming Lei)
Abstract	In this paper, we report on the fabrication and characterization of a new hydrogel-based microflow controller (HFC). The basic HFC structure is a silicon membrane having an array of orifices with an internal structure designed to confine the hydrogel while allowing it to control the flow across the membrane. Each orifice (140 /spl mu/m diameter) in the membrane has a central post held by two sets of tethers on each side. The hydrogel polymerized inside such orifices contracts around the post in the shrunken state, allowing the pass of fluid through the perimeter. In the swollen state, the hydrogel occupies the whole volume of the orifice completely blocking the flow. Fabrication of the structure involve a combination of deep trench etch and KOH etch. Two different hydrogels, temperature-sensitive and glucose-sensitive, have been tested in the HFC. The measured response times were 10 seconds and 10 minutes respectively.
Starting Page	84
Ending Page	87
File Size	236852
Page Count	4
File Format	PDF
ISBN	0780377443
ISSN	10846999
DOI	10.1109/MEMSYS.2003.1189693
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2003-01-23
Publisher Place	Japan
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Orifices Hybrid fiber coaxial cables Biomembranes Fabrication Etching Silicon Fluid flow control Polymers Contracts Testing
Content Type	Text
Resource Type	Article
Subject	Condensed Matter Physics Electronic, Optical and Magnetic Materials Mechanical Engineering Electrical and Electronic Engineering

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