NDLI: Calibration and nonlinearity compensation for force application in AFM based nanomanipulation

Content Provider	IEEE Xplore Digital Library
Author	Hui Xie Vitard, J. Haliyo, S. Regnier, S.
Copyright Year	2008
Description	Author affiliation: Inst. des Syst. Intelligents et Robot., Univ. Pierre et Marie Curie - Paris, Fontenay-aux-Roses (Hui Xie; Vitard, J.; Haliyo, S.; Regnier, S.)
Abstract	Both the extent and accuracy of force application in atomic force microscope (AFM) nanomanipulation are significantly limited by the nonlinearity of the commonly used optical lever with a nonlinear position-sensitive detector (PSD). In order to compensate the nonlinearity of the optical lever, a nonlinear calibration method is presented. This method applies the nonlinear curve fit to a full-range position-voltage response of the photodiode, obtaining a continuous function of its voltage-related sensitivity. Thus, Interaction forces can be defined as integrals of this sensitivity function between any two responses of photodiode voltage outputs, instead of rough transformation with a single conversion factor. The lateral position-voltage response of the photodiode, a universally acknowledged puzzle, was directly characterized by an accurately calibrated force sensor composed of a tippless piezoresistive force sensor, regardless of any knowledge of the cantilevers and laser measuring system. Experiments using a rectangular cantilever (normal force constant 0.24 N/m) demonstrated that the proposed nonlinear calibration method restrained the sensitivity error of normal position-voltage responses to 3.6% and extended the force application range.
Starting Page	4024
Ending Page	4029
File Size	1787790
Page Count	6
File Format	PDF
ISBN	9781424420575
DOI	10.1109/IROS.2008.4650618
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-09-22
Publisher Place	France
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Force Sensitivity Calibration Optical sensors Photodiodes Nonlinear optics Optical imaging nonlinearity compensation Atomic force microscope nanomanipulation force calibration
Content Type	Text
Resource Type	Article

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