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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Nakajima, M. Arai, F. Dong, L. Nagai, M. Fukuda, T. |
| Copyright Year | 2004 |
| Description | Author affiliation: Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Japan (Nakajima, M.; Arai, F.; Dong, L.; Nagai, M.; Fukuda, T.) |
| Abstract | A hybrid nanorobotic manipulation system, which is integrated with a nanorobotic manipulator inside a transmission electron microscope (TEM) and nanorobotic manipulators inside a scanning electron microscope (SEM), is presented. The new type of nanomanipulation system has high enough resolution to identify nano-scale objects due to the adoption of a TEM, and efficient and rapid nanomanipulations are realized with wide enough working space of the SEM nanomanipulators. The TEM nanomanipulator has been constructed with 4 multi-layer piezoelectric actuators for driving in 3 translational degrees of freedom (DOFs) and a passively driven 3-DOF sample stage through SEM nanorobotic manipulators to perform relatively complex manipulations whereas to keep compact volume to be installed inside the narrow vacuum chamber of a TEM. To show the effectiveness of the system, the interlayer resistance of a destructively fabricated multi-walled carbon nanotube has been measured inside a SEM whereas the telescoping structure formed by pulling out inner layers from outer layers of the tube is observed inside a TEM. |
| Starting Page | 589 |
| Ending Page | 594 |
| File Size | 398214 |
| Page Count | 6 |
| File Format | |
| ISBN | 0780384636 |
| DOI | 10.1109/IROS.2004.1389416 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2004-09-28 |
| Publisher Place | Japan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Scanning electron microscopy Transmission electron microscopy Atomic force microscopy Carbon nanotubes Systems engineering and theory Cities and towns Piezoelectric actuators Electrical resistance measurement Mechanical variables measurement Mechanical factors |
| Content Type | Text |
| Resource Type | Article |
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