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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Clevy, C. Hubert, A. Chaillet, N. |
| Copyright Year | 2004 |
| Description | Author affiliation: Lab. d' Autom. de Besancon, France (Clevy, C.; Hubert, A.; Chaillet, N.) |
| Abstract | This paper deals with the design, fabrication and characterization of a new micro-tools changer for a micromanipulation station including three translation stages (X-Y-Z manipulator) and a new piezoelectric microgripper. This system can be implemented in confined workspaces such as a scanning electron microscope (SEM) or more generally in a micro-factory station by the reduction of the manipulator's size and the flexibility gain. The principle of this micro-tools changer is based on the use of a thermal glue whose state (liquid or solid) is controlled by surface mounted device (SMD) electrical resistances. Such system allows hundreds of automatic micro-tools exchanges with a maximum position error between two consecutive tools exchanges of respectively 4.2, 2.8 and 5.4 /spl mu/m on the X, Y and Z axis. To validate the use of the micromanipulation station in a SEM, an experimental comparison of the working principle in low (vacuum) and high (air) pressure has also been established through thermal and degassing studies. |
| Starting Page | 230 |
| Ending Page | 235 |
| File Size | 515433 |
| Page Count | 6 |
| File Format | |
| ISBN | 0780384636 |
| DOI | 10.1109/IROS.2004.1389357 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2004-09-28 |
| Publisher Place | Japan |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Grippers Scanning electron microscopy Fabrication Manipulator dynamics Micromanipulators Actuators Fingers Thermal resistance Solids Automatic control |
| Content Type | Text |
| Resource Type | Article |
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