NDLI: Thermal characterization of a thin film heater on glass substrate for lab-on-chip applications

Content Provider	IEEE Xplore Digital Library
Author	Scorzoni, A. Tavernelli, M. Placidi, P. Valigi, P. Caputo, D. de Cesare, G. Petrucci, G. Nascetti, A.
Copyright Year	2014
Description	Author affiliation: Dept. of Eng., Univ. of Perugia, Perugia, Italy (Scorzoni, A.; Tavernelli, M.; Placidi, P.; Valigi, P.) \|\| D.I.E.T, Sapienza Univ. of Rome, Rome, Italy (Caputo, D.; de Cesare, G.; Petrucci, G.; Nascetti, A.)
Abstract	This paper presents for the first time an accurate thermal characterization of thin film heaters manufactured on glass substrates. The characterization has been performed on Cr/Al/Cr meandered heaters. Techniques commonly adopted for measuring the temperature coefficient of resistance, the thermal resistance and thermal capacitance in the case of Si-based microheaters have been conveniently modified to take into account the fundamentally different thermal parameters of a heater manufactured on glass. In order to reduce power consumption, 250 μm wide trenches were manufactured on the back side of the heaters, obtaining an increase of the thermal resistance of about 50% when the glass is in good thermal contact with a heat sink. The measured values of thermal resistance and time constants on a heat sink and in air have been justified with simple physical considerations. Guidelines are also given for a further increase of the thermal resistance of the thin film heaters.
Starting Page	1089
Ending Page	1094
File Size	795465
Page Count	6
File Format	PDF
ISBN	9781467363860
DOI	10.1109/I2MTC.2014.6860910
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2014-05-12
Publisher Place	Uruguay
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Temperature measurement Electrical resistance measurement Resistance heating Glass Thermal resistance automatic characterization Thin film heater on glass glass microfabrication microheater 4-wire measurement thermal resistance thermal capacitance thermal time constant Lab-on-chip
Content Type	Text
Resource Type	Article

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