NDLI: Design and Fabrication of an Infrared Microspectrometer using Attenuated Total Reflection

Content Provider	IEEE Xplore Digital Library
Author	de Graaf, G. van der Vlist, W. Wolffenbuttel, R.F.
Copyright Year	2007
Description	Author affiliation: Delft Univ. of Technol., Delft (de Graaf, G.)
Abstract	This paper presents a concept for a fully integrated spectrometer system based on Attenuated Total Reflection. Operation is in the mid-infrared spectral range (lambda = 1.8 mum-5 mum). The approach allows micromachined integration of all critical components of the system: a thermal IR source, optical filtering, the ATR element, a detector array and a signal processing chip. Two bulk-micromachined silicon dies are used. The wideband light source and detector array for analysing the spectrum are fabricated in the bottom die. Polysilicon heaters on thin oxide- nitride bridges are used as the IR emitter and polysilicon thermocouples on thin membranes as IR detectors. The interaction between the sample and the evanescent field of the internally reflected IR beam takes place at the top die, which contains the bulk silicon ATR element Other optical components, required for defining the path of the IR light beam, like gratings, mirrors, transmission filters, Fresnel lenses and slits, can be fabricated on the top die also.
Starting Page	1395
Ending Page	1399
File Size	3819945
Page Count	5
File Format	PDF
ISBN	9781424407545
DOI	10.1109/ISIE.2007.4374805
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-06-04
Publisher Place	Spain
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Optical filters Optical arrays Optical reflection Optical devices Optical signal processing Infrared detectors Sensor arrays Silicon Spectroscopy
Content Type	Text
Resource Type	Article

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