NDLI: Effect of nitrogen doping on electrical properties of amorphous carbon thin film prepared by aerosol-assisted thermal CVD

Content Provider	IEEE Xplore Digital Library
Author	Fadzilah, A.N. Rusop, M.
Copyright Year	2011
Description	Author affiliation: NANO- ElecTronic Center (NET), Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia (Fadzilah, A.N.; Rusop, M.)
Abstract	This paper reports on the effect of nitrogen doping of p-type semiconducting amorphous carbon (p-C) films fabricated onto the glass substrate by Aerosol-Assisted Thermal Chemical Vapor Deposition using natural source of camphor oil as the precursor material. From the characterization of the electrical properties using current-voltage (I–V) measurement, I–V graph was modeled. The analyze reveal that conductivity shows an increment in the N2 doped thin film, both in dark and under illumination condition. Other than that, optical and structural properties were also characterized by using UV-VIS-NIR system and Atomic Force Microscopy. The same trend of optical and electrical can be seen when the measurement from the Tauc's plot expose a decreasing value of optical band gap as temperature increase.
Starting Page	431
Ending Page	435
File Size	317819
Page Count	5
File Format	PDF
ISBN	9781457714184
e-ISBN	9781457714177
DOI	10.1109/ISIEA.2011.6108746
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2011-09-25
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	A-C thin films Camphor oil Aerosol-Assiste Chemical Vapor Deposition (AACVD) Doping Conductivity Diamond-like carbon Electrical Properties Optical films Carbon
Content Type	Text
Resource Type	Article

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