NDLI: Microstructure pattern etching by reactive ion etching (RIE) for future reproductivity of nanogap biosensor

Content Provider	IEEE Xplore Digital Library
Author	Humayun, Q. Hashim, U.
Copyright Year	2012
Description	Author affiliation: Nano Structure Lab-On-Chip Research Group, Institute Nano Electronic Engineering (INEE), Universiti Malaysia Perlis (UniMap), 01000Kangar, Malaysia (Humayun, Q.; Hashim, U.)
Abstract	This article is a study about reactive ion etching as applied to etch substrate directionality, which is the important feature of RIE. The biosensors based on polysilicon material should be sensitive and selective for the detection of bio molecule. The objective of this research is to design, and fabricate polysilicon microstructures. The proposed microstructures were designed initially by using AutoCAD software and then transferred to commercial chrome mask. Standard photolithography process coupled with reactive ion etching (RIE) was used for fabrication of proposed microstructures. The fabrication process start by microstructures formation on resist and then by reactive ion etching (RIE) the proposed polysilicon microstructures was created onto sample wafer. Future work will focuse on to reduce the microstructures size by thermal oxidation process until the structures break at junction and create gaps of nano sizes. For biomolecules sensing applications, the sizes of the gaps must be small enough to allow the biomolecule inserted into the gaps space to connect both leads to keep the molecules in a relaxed and undistorted state.
Starting Page	499
Ending Page	502
File Size	1939982
Page Count	4
File Format	PDF
ISBN	9781467316644
e-ISBN	9781467316668
DOI	10.1109/IECBES.2012.6498101
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2012-12-17
Publisher Place	Malaysia
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Biosensor Thermal oxidation Nanogap Microstructure Photolithography RIE
Content Type	Text
Resource Type	Article

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