NDLI: Optimization of cavity fabrication for micro-fluidic systems

Content Provider	IEEE Xplore Digital Library
Author	Wang, X.S. Balluch, B. Smetana, W. Stangl, G.
Copyright Year	2008
Description	Author affiliation: AEM-Group, Vienna Univ. of Technol., Vienna, Austria (Wang, X.S.; Balluch, B.; Smetana, W.; Stangl, G.)
Abstract	Processing parameters for an optimized fabrication of micro structures with dimensions ranging from 20 mum to 4 mm channel width and up to 2 mm height providing height/width aspect ratios of 10/1 have been investigated for 3 different LTCC-tapes (low temperature co-fired ceramics). The fabrication process is based on an optimized NdYAG-laser machining process and an adapted isostatic single step lamination method where a remarkable reduction of recommended lamination pressure is conducted successfully, in order to minimize distortions of channel geometry but still providing tightness of laminated LTCC-layers. Different procedures have been tested to improve channel geometry. Consequently different tape-compatible SVM (sacrificial volume materials) have been employed, including liquids working as fillers and adhesives, respectively. The preprocessed structures have been fired in accordance with TGA-optimized (thermo gravimetric analysis) firing profiles which provide a residue-free burnout. This paper summarizes the influence of processing parameters on the final dimensions of various test channel devices.
Starting Page	414
Ending Page	419
File Size	456783
Page Count	6
File Format	PDF
ISBN	9781424439720
DOI	10.1109/ISSE.2008.5276640
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2008-05-07
Publisher Place	Hungary
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Fabrication Lamination Geometry Testing Temperature distribution Ceramics Optimization methods Machining Support vector machines Conducting materials
Content Type	Text
Resource Type	Article

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