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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Zammit, D. Casha, O. Grech, I. Gatt, E. Micallef, J. |
| Copyright Year | 2013 |
| Description | Author affiliation: Dept. of Microelectron. & Nanoelectron., Univ. of Malta, Msida, Malta (Zammit, D.; Casha, O.; Grech, I.; Gatt, E.; Micallef, J.) |
| Abstract | This paper presents the design and study of a MEMS tapped-inductor LC resonator tank, proposed to evaluate the improved performance over that generally achieved in standard CMOS passive component integration. The resonator tank, consisting of a fixed-value inductor and a variable capacitor, was implemented in the MetalMUMPs process and was targeted for a VCO intended for telemetry applications. A geometrically optimized 1.25 nH horseshoe inductor was designed and results show that it exhibits a Q-factor of 63 at 7.3 GHz and a self-resonating frequency of 17.6 GHz. In addition, an improved π-inductor model is proposed for design and simulation purposes. The variable capacitor was designed in a parallel-plate topology, using four serpentine springs. The capacitance can be varied from 0.183 pF to 0.245 pF with an actuation voltage in the range of 0 V-to-11.7 V. A Q-factor of 62 at 1.1 GHz and a self-resonating frequency above 10 GHz were achieved. The designed inductor and capacitor were configured in a resonator tank topology yielding an overall Q-factor of 22 at 4.9 GHz. |
| Sponsorship | IEEE |
| Starting Page | 819 |
| Ending Page | 822 |
| File Size | 567678 |
| Page Count | 4 |
| File Format | |
| ISBN | 9781479924523 |
| DOI | 10.1109/ICECS.2013.6815540 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 2013-12-08 |
| Publisher Place | United Arab Emirates |
| Access Restriction | Subscribed |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Inductors Q-factor Micromechanical devices Capacitors Substrates Integrated circuit modeling Voltage-controlled oscillators |
| Content Type | Text |
| Resource Type | Article |
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