NDLI: Smear-less SOI image sensor

Content Provider	IEEE Xplore Digital Library
Author	Senda, K. Fujii, E. Hiroshima, Y. Takamura, T.
Copyright Year	1986
Description	Author affiliation: Matsushita Electronics Corporation, Osaka, Japan (Senda, K.)
Abstract	An SOI image sensor where the read-out transistors are well isolated from the silicon substrate is proposed. The isolation results in remarkable reduction of the photo-leakage current to a value as low as 1/8000 times that in the conventional bulk transistors, implying the corresponding reduction of smear noise of the sensor. It is pointed out also that the parasitic capacitance of the vertical signal line in the SOI structure is reduced to a half value of that in the bulk structure. With the use of the large area seeding-region serving also as a photodiode region, a high-quality SOI film has been obtained by the laser recrystallization. The structure of the SOI image sensor is the hybrid integration of the SOI transistors and the bulk transistors. As a result, the video output signal of 50 pixels has been successfully obtained.
Starting Page	369
Ending Page	372
File Size	434587
Page Count	4
File Format	PDF
DOI	10.1109/IEDM.1986.191194
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	1986-12-07
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Image sensors Substrates Photodiodes Silicon on insulator technology Semiconductor device noise Photoconductivity Optical noise Epitaxial growth Sensor phenomena and characterization Circuits
Content Type	Text
Resource Type	Article

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3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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