NDLI: Bulk-Metal-Based Mems Fabricated by Micro-Electro-Discharge Machining

Content Provider	IEEE Xplore Digital Library
Author	Takahata, K. Gianchandani, Y.B.
Copyright Year	2007
Description	Author affiliation: Univ. of British Columbia, Vancouver (Takahata, K.)
Abstract	This paper presents the recent development of micro-electro-mechanical systems (MEMS) and devices realized by planar micromachining of metal foils. New types of cardiac stents including sensor-integrated antenna stents, a micromachined Kelvin probe with an integrated actuator, an intraluminal flow sensor cuff, and a mechanically/chemically robust capacitive pressure sensor are reported. Micro-electro-discharge machining (muEDM) and the modified processes were used for the fabrication of the devices with mechanical or electromechanical functionality. The cost-effective manufacturing is potentially available with the use of the batch mode muEDM technology that employs lithographically fabricated microelectrode arrays.
Starting Page	1
Ending Page	4
File Size	1876564
Page Count	4
File Format	PDF
ISBN	1424410207
ISSN	08407789
DOI	10.1109/CCECE.2007.7
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2007-04-22
Publisher Place	Canada
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Machining Chemical sensors Capacitive sensors Electromechanical sensors Mechanical sensors Microelectromechanical systems Micromechanical devices Micromachining Kelvin Probes
Content Type	Text
Resource Type	Article
Subject	Electrical and Electronic Engineering Hardware and Architecture

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1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
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4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
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