NDLI: SACVD clean investigation with a new calorimetric probe sensor

Content Provider	IEEE Xplore Digital Library
Author	Kunstmann, T. Paulus, S. Ing-Shin Chen Auer, H. Lin Feng Chism, R. Roeder, J.F.
Copyright Year	2009
Description	Author affiliation: ATMI, Danbury, Connecticut 06810 USA (Ing-Shin Chen; Auer, H.; Lin Feng; Chism, R.; Roeder, J.F.) \|\| Infineon Technologies AG, Wernerwerkstrasse 2, 93009 Regensburg, Germany (Kunstmann, T.; Paulus, S.)
Abstract	Doped and undoped SACVD recipes were investigated with respect to their clean performance with a new calorimetric probe sensor. Endpoint curves were collected with a standalone software utility, and results were analyzed post-acquisition offline. The impact of preventive maintenance (PM) activities and different single/multiple cleans towards clean performance were investigated. A numerical model for the clean behavior after annual chamber PM's was developed. Clean time optimization was carried out for different recipes.
Starting Page	155
Ending Page	160
File Size	848201
Page Count	6
File Format	PDF
ISBN	9781424436149
ISSN	10788743
DOI	10.1109/ASMC.2009.5155974
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2009-05-10
Publisher Place	Germany
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Probes Argon Hardware Valves Preventive maintenance Production Monitoring Effluents Numerical models Liquids
Content Type	Text
Resource Type	Article
Subject	Industrial and Manufacturing Engineering Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering

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