NDLI: A MEMS-based, high-sensitivity pressure sensor for ultraclean semiconductor applications

Content Provider	IEEE Xplore Digital Library
Author	Henning, A.K. Mourlas, N. Metz, S. Zias, A.
Copyright Year	2002
Description	Author affiliation: Redwood Microsystems Inc., Menlo Park, CA, USA (Henning, A.K.; Mourlas, N.; Metz, S.)
Abstract	Process applications in the semiconductor industry require increasing levels of performance in pressure measurement and control. In addition, measurement and control of process mass flows are moving toward pressure-based mass flow controllers (MFCs). This work reports the development of a MEMS-based pressure sensor with the requisite performance for rigorous pressure and flow sensing sensing. The pressure sensing element consists of two capacitor plates, whose separation varies as a function of the radial distance from the center of the structure. The bottom capacitor plate is mechanically fixed, while the upper plate is a flexible silicon membrane. A variable separation between the plates is introduced by locating a hub in the center of the structure, and stretching the membrane over this structure. The theoretical principles, fabrication and performance of the structure are discussed.
Sponsorship	IEEE Electron Devices Soc. Components, Packagin & Manuf. Technol. Soc. MICRO
Starting Page	165
Ending Page	168
File Size	334202
Page Count	4
File Format	PDF
ISBN	0780371585
DOI	10.1109/ASMC.2002.1001596
Language	English
Publisher	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Publisher Date	2002-04-30
Publisher Place	USA
Access Restriction	Subscribed
Rights Holder	Institute of Electrical and Electronics Engineers, Inc. (IEEE)
Subject Keyword	Pressure control Weight control Capacitors Biomembranes Electronics industry Pressure measurement Fluid flow measurement Process control Silicon Fabrication
Content Type	Text
Resource Type	Article

Sl.	Authority	Responsibilities	Communication Details
1	Ministry of Education (GoI), Department of Higher Education	Sanctioning Authority	https://www.education.gov.in/ict-initiatives
2	Indian Institute of Technology Kharagpur	Host Institute of the Project: The host institute of the project is responsible for providing infrastructure support and hosting the project	https://www.iitkgp.ac.in
3	National Digital Library of India Office, Indian Institute of Technology Kharagpur	The administrative and infrastructural headquarters of the project	Dr. B. Sutradhar bsutra@ndl.gov.in
4	Project PI / Joint PI	Principal Investigator and Joint Principal Investigators of the project	Dr. B. Sutradhar bsutra@ndl.gov.in Prof. Saswat Chakrabarti will be added soon
5	Website/Portal (Helpdesk)	Queries regarding NDLI and its services	support@ndl.gov.in
6	Contents and Copyright Issues	Queries related to content curation and copyright issues	content@ndl.gov.in
7	National Digital Library of India Club (NDLI Club)	Queries related to NDLI Club formation, support, user awareness program, seminar/symposium, collaboration, social media, promotion, and outreach	clubsupport@ndl.gov.in
8	Digital Preservation Centre (DPC)	Assistance with digitizing and archiving copyright-free printed books	dpc@ndl.gov.in
9	IDR Setup or Support	Queries related to establishment and support of Institutional Digital Repository (IDR) and IDR workshops	idr@ndl.gov.in

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