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| Content Provider | IEEE Xplore Digital Library |
|---|---|
| Author | Youmin Liu Chi Jiaa Hoa Do Eltonkhy, A. |
| Copyright Year | 1965 |
| Abstract | A set of amorphous carbon nitride, a-C:N, films on the magnetic rigid disk with different sputter parameters were analyzed by IR spectroscopy. The IR spectra of a-C:N thin films are sensitive to the change of the sputter parameters, such as the pallet speed, the pre-mixture percentage nitrogen in the carrier gas and the sputter power. The comparison of ESCA analysis with the IR data shows that nitrogen atoms incorporate in the graphite ring in different modes as the sputter parameters change. The most influential parameter is the percentage of pre-mixture nitrogen in the carrier gas. As the percentage of N/sub 2/ in the carrier gas increases to 40, the nitrogen and carbon which is in the sp/sup 2/ bonded state becomes more ordered. |
| Sponsorship | IEEE Magnetics Society |
| Starting Page | 3106 |
| Ending Page | 3108 |
| Page Count | 3 |
| File Size | 412306 |
| File Format | |
| ISSN | 00189464 |
| Volume Number | 33 |
| Issue Number | 5 |
| Language | English |
| Publisher | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Publisher Date | 1997-09-01 |
| Publisher Place | U.S.A. |
| Access Restriction | One Nation One Subscription (ONOS) |
| Rights Holder | Institute of Electrical and Electronics Engineers, Inc. (IEEE) |
| Subject Keyword | Amorphous materials Magnetic films Amorphous magnetic materials Nitrogen Sputtering Magnetic analysis Infrared spectra Spectroscopy Bonding |
| Content Type | Text |
| Resource Type | Article |
| Subject | Electronic, Optical and Magnetic Materials Electrical and Electronic Engineering |
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